Z-chip tilt opening piezo stage P-5x8
The nano-level motion amount is 100µm and 200µm on the Z-axis, with chip tilt axes of 1mrad and 2mrad, and is optimal for transmitted light with a 66mm aperture.
The P-5x8 series features the piezo nano stage P-518.TCD with chip tilt and the long-stroke version P-528.TCD/ZCD, both developed on the same platform. It achieves a system resolution of 0.8 nm and a linearity error of 0.03% using highly reliable PICMA piezo ceramics, flexure guides, parallel kinematics, and capacitive sensors. The large aperture of 66 × 66 mm is suitable for interferometric measurements and transmitted light applications, with a load capacity of 50N, making it ideal for semiconductor testing, photonics, microscopy, and high-precision alignment. *For more details, please download the PDF or contact us.
basic information
- 1-axis and 3-axis versions - Achieves closed-loop vertical/tilt range of ~200μm/2mrad (open-loop ~240μm/2.4mrad) - Improved responsiveness through parallel control/measurement structure / precise multi-axis control - Frictionless precision flexure guide system - Remarkable long lifespan with PICMA(TM) piezo actuators - Center opening of 66 x 66mm - High linearity with capacitive sensors *For more details, please download the PDF or contact us.
Price information
Please feel free to contact us.
Delivery Time
Model number/Brand name
P-518, P-528 Piezo Z/Chip/Tilt Stage
Applications/Examples of results
Application examples - Various measurements - Interferometer - Optics - Scanning microscope - Mass storage device testing - Laser technology - Micro-machining
