Lens Focus Scanner P-726 for Semiconductor Wafer Inspection
High-load compatible, high-precision Z-focus scanner supporting high throughput in wafer inspection.
In semiconductor wafer inspection, high-resolution Z-axis focus control and fast responsiveness are required to stably detect fine defects. Particularly in optical inspection systems using high NA objectives, focus accuracy and reproducibility are directly linked to the reliability of inspection results. The P-726 PIFOC high-load objective lens focus scanner achieves a Z stroke of up to 100 µm with sub-nanometer resolution in position control. Direct position feedback from a capacitive sensor and a flexure guide structure provide high linearity, repeatability, and long-term stability. Furthermore, its high-speed settling performance of approximately 6 ms contributes to the optimization of inspection processes involving Z-step movements. Due to its high-load design, stable operation is possible even when using high NA objectives or additional optical components. [Application Scenarios] - Z focus control in optical inspection of semiconductor wafer surfaces - Defect analysis equipment using high NA objectives - Three-dimensional inspection using confocal optical systems - Z scanning in laser and optical interference inspection devices [Benefits of Implementation] - Improved measurement stability through high-precision focus control - Reduced Z step time due to high-speed settling - Increased design flexibility of optical systems due to high-load capability
basic information
【Features】 - High dynamic positioning/scanning with large objective lens - Resonant frequency of 1120Hz (560Hz at 210g load) - Standard settling time of approximately 6ms - Stroke of 100μm - Direct measurement using capacitive sensors achieves high linearity, stability, and dynamics - Resolution of up to 0.3nm - Improved focus stability through frictionless precision flexure guides 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience with our Japanese subsidiary, we provide optimal solutions tailored to our customers' needs. With a diverse product lineup including piezo stages and extensive knowledge in positioning, we support our customers in solving their challenges.
Price information
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Model number/Brand name
P-726 PIFOC(R) High Load Objective Lens Scanner
Applications/Examples of results
Application examples - 3D images - Screening - Autofocus system - Microscope - Confocal microscope - Surface shape analysis - Wafer inspection
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.