[For Semiconductors] PIHera High-Precision Z-Axis Stage with 0.1 nm Resolution
Provides sub-nanometer resolution. 0.1nm resolution and high linearity vertical positioning.
In the semiconductor industry, high-precision positioning is required. Especially in wafer inspection and measurement of fine structures, sub-nanometer level stability and high-speed control are essential. Positioning errors can compromise the reliability of measurement results and potentially lead to reduced yields. This product achieves high-precision positioning in semiconductor measurements with a resolution of 0.1 nm and linearity of 0.02%. 【Application Scenes】 - Wafer inspection - Measurement of fine structures - Interferometers - Confocal microscopes 【Benefits of Implementation】 - Significant improvement in measurement accuracy - Yield enhancement - High-speed and high-precision positioning - Sub-nanometer level stability You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.
basic information
【Features】 - 0.1 nm resolution - 0.02% positioning accuracy - Frictionless precision flexure guide system - Long lifespan with PICMA(TM) piezo actuators - Vacuum-compatible version also available 【Our Strengths】 Based on precision control technology cultivated over more than 50 years at our headquarters in Germany, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide. With a rich lineup and technical expertise, we propose optimal solutions to meet our customers' needs.
Price information
Please feel free to contact us.
Delivery Time
Model number/Brand name
P-620.Z - P-622.Z PIHera High Precision Stage
Applications/Examples of results
Application examples - Interferometer - Microscopic examination - Nano positioning - Biotechnology - Quality assurance testing - Semiconductor technology
catalog（3）
Download All Catalogs
Recommended products
Distributors
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.