High-precision Z stage for nano positioning with 0.1nm resolution
0.1 nm resolution and 0.02% linearity. Improved manufacturing and measurement accuracy with sub-nanometer Z-axis control.
In the nanotechnology manufacturing industry, sub-nanometer positioning accuracy is essential for microfabrication and precision measurement. Particularly in semiconductor manufacturing and the production processes of MEMS devices, even slight positional shifts can significantly impact product quality. The P-620.Z to P-622.Z models achieve high reliability and long lifespan through a combination of a frictionless flexure guide system and PICMA piezo actuators, contributing to the stabilization of manufacturing processes. [Application Scenarios] - Wafer inspection in semiconductor manufacturing - Microfabrication in MEMS device manufacturing - Precision measurements such as interferometers and confocal microscopes [Benefits of Implementation] - Improved yield in manufacturing processes - Enhanced product quality - Increased measurement accuracy You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.
basic information
【Features】 - 0.1 nm resolution - 0.02% positioning accuracy - Frictionless precision flexure guide system - Long lifespan with PICMA(TM) piezo actuators - Vacuum-compatible version available 【Our Strengths】 Based on precision control technology developed over more than 50 years at our headquarters in Germany, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide. With a rich lineup and technical expertise, we offer optimal solutions tailored to our customers' needs.
Price information
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Model number/Brand name
P-620.Z - P-622.Z PIHera High Precision Z Stage
Applications/Examples of results
Application examples - Interferometer - Microscopic examination - Nano positioning - Biotechnology - Quality assurance testing - Semiconductor technology
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.