【For Laser Processing】Opening 66×66mm Multi-Axis Piezo Scanner
Integrated structure with zero friction flexure guide for precise control of laser beams.
In the laser processing industry, the precise positioning and control of the laser beam are crucial factors that influence processing accuracy and efficiency. Particularly in fine processing and high-speed processing, nano-level precision and high responsiveness are required. Conventional control methods have limitations in positioning accuracy and response speed, which can lead to a decline in processing quality and stagnation in productivity. The P-517/527 multi-axis piezo scanner utilizes frictionless flexure guides, PICMA piezo ceramics, and capacitive sensors to achieve nano-level reproducibility and resolution, enabling precise positioning and control of the laser beam. 【Application Scenarios】 - Laser marking - Laser cutting - Laser fine processing - Laser scanning 【Benefits of Implementation】 - Achieves high-precision laser processing - Reduces processing time - Improves yield - Accommodates diverse processing needs
basic information
【Features】 - 2-axis and 3-axis versions (XY and XYθZ) - Stroke up to 200μm - Sub-nanometer resolution - Frictionless high-precision flexure guide system - High linearity with capacitive sensors - Improved responsiveness and multi-axis precision control through parallel control/measurement structure - Center opening 66 x 66mm - Remarkable long lifespan with PICMA(TM) piezo actuators 【Our Strengths】 Based on over 50 years of experience from our headquarters in Germany and 30 years of experience from our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we propose optimal solutions to meet our customers' needs.
Price information
Please feel free to contact us.
Delivery Time
Model number/Brand name
P-517・P-527 Multi-Axis Piezo Scanner
Applications/Examples of results
Application examples - Metrology - Interferometer - Optics - Lithography - Nanopositioning - Scanning microscope - Mass storage device testing - Laser technology - Micro machining
catalog（5）
Download All Catalogs
Recommended products
Distributors
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.