P-5x8 Piezo Stage with Z Chip Tilt Aperture for Optical Adjustment
Piezo stage with an opening that achieves nano-level adjustments.
In optical system adjustments, even a slight misalignment of the optical axis can significantly impact resolution and measurement accuracy. This is especially critical in applications such as interferometers, high-resolution microscopes, and precision alignment, where nano-level Z control and tip-tilt adjustments are essential. The P-518/P-528 series achieves high-precision control with Z-axis strokes of 100µm/200µm and tip-tilt of 1mrad/2mrad. Its large aperture design of 66mm makes it ideal for transmitted light applications. The high-rigidity flexure guide structure ensures stable reproducibility, contributing to improved accuracy and efficiency in optical adjustment tasks. 【Application Scenarios】 - Adjustment of microscope objective lenses and samples - Optical fiber alignment - Interferometer and wavefront measurement systems - Semiconductor inspection equipment 【Benefits of Implementation】 - Nano-level Z and angle adjustments - Flexible adaptation to transmitted light optical systems - Improved measurement accuracy through stable optical axis maintenance - Enhanced work efficiency due to reduced adjustment time
basic information
【Features】 - 1-axis and 3-axis versions - Achieves closed-loop vertical/tilt range of up to 200μm/2mrad - Improved responsiveness and multi-axis precision control through parallel control/measurement structure - Frictionless precision flexure guide system - Remarkable long lifespan with PICMA(TM) piezo actuators - Center opening of 66 x 66mm - High linearity with capacitive sensors 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide optimal solutions tailored to our customers' needs. With a diverse product lineup including piezo stages and extensive knowledge in positioning, we support our customers in solving their challenges.
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Model number/Brand name
P-518・P-528 Piezo Z/Chip/Tilt Stage
Applications/Examples of results
Application examples - Various measurements - Interferometer - Optics - Scanning microscope - Mass storage device testing - Laser technology - Micro-machining
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.