[Piezostage for Semiconductor Manufacturing] XYZ Axis P-616
For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.
In semiconductor processes and inspection equipment, position correction and focus adjustment at the submicron level are key to stabilizing quality. Particularly in inspection and fine processing stages, high-precision position control with nanometer resolution is required. The P-616 NanoCube is a compact XYZ piezo nano positioner with a stroke of 100 µm on each axis. Its high-rigidity flexure guide structure enables smooth operation without backlash, allowing for fine position adjustments with nanometer resolution. It is suitable for applications such as fine motion correction stages in semiconductor manufacturing equipment and integration into inspection devices. 【Application Scenarios】 - Fine position correction for wafer inspection equipment - Mask inspection processes - Focus adjustment for laser annealing devices - Fine motion control for probing equipment - Semiconductor research and development applications 【Benefits of Implementation】 - High-precision position correction with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into devices with compact design - Contributes to the stabilization of fine processes
basic information
【Features】 - Maximum travel range of 100×100×100μm - Extremely compact and lightweight - Excellent resolution and fast response - High-speed 3-axis scanning - Frictionless and high-precision flexure guide system 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience with our Japanese subsidiary, we provide optimal positioning solutions tailored to our customers' needs. In addition to piezo stages, we offer a wide range of products and peripherals such as granite bases, and we can also propose complex systems.
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Model number/Brand name
P-616 NanoCube XYZ Axis Piezo Stage
Applications/Examples of results
【Applications】 ■ Photonics / Built-in Optical Devices ■ Micromanipulation ■ Biotechnology ■ Semiconductor Testing ■ Fiber Positioning, etc. *For more details, please refer to the PDF document or feel free to contact us.
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.