XYZ Axis Piezo Stage P-616 for Laser Processing
A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.
In laser microfabrication, even slight deviations in beam position or focus directly affect processing quality. This is especially true for microfabrication and high aspect ratio processing, where precise position control at the sub-micron level is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with 100 µm stroke on each axis. Its high-rigidity flexure guide structure enables backlash-free, highly linear motion, allowing for fine position adjustments with nanometer resolution. By integrating it into laser processing equipment, it supports: - Fine adjustment of beam position - High-precision control of focus position - Correction of processing position to enhance the stability of microfabrication. 【Application Scenarios】 - Integration into laser microfabrication equipment - Precise control of focus position - Position correction for micro-drilling processes - Thin film processing and precision patterning 【Benefits of Implementation】 - High-precision control of focus position with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into equipment with compact design - Stabilization of microfabrication quality
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【Features】 - Maximum travel range of 100×100×100μm - Extremely compact and lightweight - Excellent resolution and fast response - High-speed 3-axis scanning - Frictionless and high-precision flexure guide system 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience at our Japanese subsidiary, we provide the optimal positioning solutions to meet our customers' needs. In addition to piezo stages, we offer a wide range of products and peripherals such as granite bases, and we can also propose complex systems.
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【Applications】 ■ Photonics / Built-in optical devices ■ Micromanipulation ■ Biotechnology ■ Semiconductor testing ■ Fiber positioning, etc. *For more details, please refer to the PDF document or feel free to contact us.
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.