PI Japan Official site

Miniature X-axis piezo stage with built-in capacitive sensor for microscopes.

For nano-precision scanning of microscope samples. Achieving stable positioning with 0.1nm resolution and high linearity.

In the field of microscopy, precise scanning of samples is required. Especially in high-magnification observations and analysis of fine structures, accurate positioning is essential. Misalignment can lead to degradation of the observed image and a decrease in measurement accuracy. The PIHera P-620.1/629.1 series addresses these challenges with 0.1 nm resolution and high-precision positioning. 【Application Scenes】 - Scanning of microscope samples - Optical alignment - Interferometric measurements 【Benefits of Implementation】 - High-precision observation and measurement - Accurate analysis of fine structures - Improved experimental efficiency You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

Official website product page

basic information

【Features】 - Stroke: 50 to 1800 μm - High precision, low cost - 0.1 nm resolution - Built-in capacitive sensor - 0.02% positioning accuracy - Frictionless high-precision flexure guide system - Long lifespan with PICMA(TM) piezo actuators - Available in X, XY, Z, and XYZ versions - Vacuum-compatible versions also available 【Our Strengths】 Based on precision control technology developed over more than 50 years at our headquarters in Germany, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide. With a rich lineup and technical expertise, we offer optimal solutions tailored to our customers' needs.

Price information

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Delivery Time

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Model number/Brand name

P-620.1・P-629.1 PIHera Small X-axis Piezo Stage

Applications/Examples of results

Application examples - Interferometer - Inspection using a microscope - Nano-positioning - Biotechnology - Quality assurance testing - Semiconductor technology

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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.