High-Precision Piezo Nano Positioner P-611.1 for Semiconductor Manufacturing
Achieving nanometer precision positioning in a compact and cost-effective manner.
In the semiconductor industry, as manufacturing processes become more advanced, high precision in the positioning of wafers and masks is required. Particularly in fine processing and inspection processes, positioning accuracy at the nanometer level affects product quality. Conventional systems have faced challenges such as large size and high costs. The P-611.1 piezo nano-positioner achieves precise positioning in semiconductor manufacturing at a low cost, with a compact design occupying only 44 x 44 mm, while providing a maximum stroke of 120 μm and a resolution of 0.2 nm. 【Application Scenarios】 - Wafer probing - Mask alignment - Fine processing - Inspection processes 【Benefits of Implementation】 - Improved yield through high-precision positioning - Space-saving due to equipment miniaturization - Enhanced return on investment through cost reduction
basic information
【Features】 - Compact design: Installation area of only 44 x 44mm - Stroke up to 120μm - Resolution up to 0.2nm - Low-cost mechanism/electronic system configuration - Remarkable long lifespan with PICMA(TM) piezo actuators 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience with our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we propose optimal solutions tailored to our customers' needs.
Price information
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Model number/Brand name
Linear Piezo Positioner P-611.1
Applications/Examples of results
Application examples - Micro machining - Microscope - Micro-manipulation - Semiconductor testing
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.