Example of analysis using EBSD: Via
The EBSD method allows for the estimation of crystal size distribution and residual stress.
We will introduce an example of analysis using EBSD for vias (Cu) formed in a multilayer substrate. With the EBSD method, it is possible to infer the distribution of crystal sizes and residual stress. Additionally, by highlighting on the map, the features that appear in the graph can be visualized. 【Overview】 ■Observation of crystal structure using EBSD ・IPF map ・GROD map ・Crystal grain distribution map *For more details, please refer to the PDF document or feel free to contact us.
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