Detection of trace elements by EPMA.
Detection sensitivity is excellent! It is particularly superior in quantitative analysis of trace components and map analysis.
EPMA analysis has good energy resolution and detection sensitivity, making it particularly excellent for quantitative analysis of trace components and map analysis. In a case where a defect occurred in the Au-1st bonding within the package, EDX analysis and EPMA analysis were conducted to identify and confirm the distribution of the corrosive substances. Since EPMA has superior resolution, detection limits, and P/B (peak-to-background) ratios compared to EDX, the distribution of trace Cl could be clearly understood. 【Equipment Specifications】 ■ Manufactured by JEOL Ltd. Jeol-8200 ■ Analysis method: Wavelength dispersive X-ray analysis (WDX) ■ Analyzable elements: B to U ■ Energy resolution: 20 eV (EDX is approximately 130 eV) ■ Detection limit: 0.01% and above ■ Maximum sample dimensions: 100×100 mm *For more details, please refer to the PDF document or feel free to contact us.
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Aites was established in 1993, originating from the quality assurance department of the IBM Japan Yasu office. Based on the technical expertise cultivated through cutting-edge defect analysis and reliability assurance of electronic components at the IBM Japan Yasu office, we have provided various products and services that support the development and manufacturing of semiconductors, displays, organic EL, solar cells, and electronic components to customers both domestically and internationally.