FE-SEM observation (Crystal grain observation of Al wire bonding section)
High-brightness electron gun for detailed SEM images! Equipped with an in-lens SE detector sensitive to surface information.
The ZEISS "FE-SEM ULTRA55" is equipped with a GEMINI column, allowing for high-resolution observation at extremely low acceleration voltages. It also features multiple detectors, enabling the observation of various samples. Composition information can be obtained using two types of backscattered electron detectors, and high-resolution EDX analysis can be performed even at low acceleration voltages. 【Features】 ■ High-brightness electron gun for detailed SEM images ■ Ultra-surface analysis at extremely low acceleration voltages ■ In-lens SE detector sensitive to surface information ■ Composition information obtained from two types of backscattered electron detectors ■ High-resolution EDX analysis even at low acceleration voltages ■ Observation without deposition *For more details, please refer to the PDF document or feel free to contact us.
basic information
[Applicable Targets] ■ IC packages, mounting and joining components, mounting substrates, LSI devices, LCD thin films, metal surface conditions, observation and analysis of crystal grains, etc. *For more details, please refer to the PDF document or feel free to contact us.*
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Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
