Realizing Precision Control in Energy Innovation

Solutions that support a sustainable future

last updated Jul 17, 2025

Flow, pressure, steam, and vacuum products "Comprehensive Catalog" *Includes flow meters and more!

The lineup also includes Coriolis mass flow meters and our company's first pressure-based mass flow controllers.

last updated Jan 30, 2025

Mass Flow Controller/ Meter "GF40 Series" and two other products.

Mass flow controller/meters that support multiple gases with a single device. A compact readout unit that can connect up to four devices is also introduced.

last updated Jul 10, 2024

Basic Knowledge of Thin Film Technology: "What is Thin Film Technology?" *Materials Provided

We will introduce a comparison of CVD and PVD, applications of flow meters and pressure gauges, and the digitalization of process control along with application examples.

last updated Jun 21, 2023

Flow and pressure measurement equipment and related services

A wide range of products with excellent durability is available. We also offer repair and maintenance services. We provide materials introducing our approach to the bio, EPC, and thin film industries.

last updated Oct 03, 2022

Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>

Thin films, coatings, and surface treatments cover a wide range of industries and applications!

last updated Apr 10, 2023

Glass tube area flowmeter / Metal tube area flowmeter

Introducing the "glass tube area flow meter," suitable for various liquids and gases!

last updated Oct 20, 2025

Area-type flow meter <Flow solution for EPC>

We have over 70 years of global experience in more than 80 countries!

last updated Sep 16, 2022

Service & Support

Reliable products, highly specialized services! We restore equipment to "like-new condition"!

last updated Sep 16, 2022

Flow and pressure measurement equipment <Biopharmaceuticals and Life Sciences industry>

To stabilize yield and process management, reliable and accurate equipment is essential!

last updated Sep 16, 2022

Auto Pressure Controller "SLA/SLAMf Series"

Automate pressure control and use it as a pressure/back pressure regulator!

last updated May 17, 2022

Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

last updated Feb 12, 2025

Pressure-based mass flow controller "GP200 series"

Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

last updated Feb 12, 2025

Metal Seal Mass Flow Controller/ Meter "GF125 Series"

MFC that makes everything possible

last updated Mar 21, 2024

Steam Supply Module "VDM300"

Achieving the highest flow accuracy in ultra-high purity DI steam supply.

last updated Feb 12, 2025

Elastomer Seal Mass Flow Meter "5700 Series"

Introducing cost-effective gas flow measurement for targeted applications!

last updated Feb 12, 2025

Mass Flow Controller/ Meter "4800 Series"

Ultra-fast response for flow processes focused on speed! Suitable for a wide variety of non-corrosive gases.

last updated Feb 12, 2025

Mass Flow Controller/ Meter "SLAMf Series"

Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.

last updated Oct 06, 2025

Mass Flow Controller/ Meter "5850E Series"

Excellent long-term stability, maintaining production accuracy! We perform highly reliable, precise, and repeatable measurements and controls.

last updated Sep 11, 2024

High-Temperature Mass Flow Controller "5850EMH Series"

Proven long-term stability! We provide ultra-high purification performance for high-temperature applications.

last updated Feb 12, 2025

Coriolis mass flow controller/meter "QuantimQMC"

The new 3rd generation Quantim QMC Coriolis flow meter is suitable for applications involving the measurement and control of small flow rates of gases and liquids.

last updated Apr 08, 2025

Glass Tube Area Flow Meter "Sho-Rate Series"

Proven performance at low flow rates. We offer versatile options to match various needs!

last updated Oct 20, 2025

Metal Tube Area Flow Meter "MT3809G Series"

Suitable for application to various gases, liquids, and vapors! A meter that accommodates a wide range of temperatures, pressures, and process ranges.

last updated Feb 12, 2025

Metal Seal Mass Flow Controller/ Meter "GF100 Series"

Applications for gas flow control with excellent response speed and repeatability.

last updated Feb 12, 2025

Glass Tube Area Flow Meter "Model GT1600"

A flow meter that allows you to select a scale/marking specified by our company according to your desired flow rate.

last updated Oct 20, 2025