Voice Coil Focus Stage V-308 for Semiconductor Manufacturing
Minimum 10 nm resolution, maximum 7 mm stroke. Achieving high-precision Z-axis focus control for semiconductor devices.
In the semiconductor manufacturing field, with the advancement of miniaturization, high-precision position control in the Z-axis direction during inspection, measurement, and exposure processes is becoming increasingly important. Even slight variations in focal position can impact inspection accuracy and process stability. The V-308 Voice Coil PIFOC is a Z-axis focus drive with a minimum resolution of 10 nm and a maximum travel range of 7 mm. Its gravity compensation feature supports stable positioning even for heavy optical systems and objective lenses, with a capacity of up to 1 kg. The direct drive system provides smooth and fast responsiveness along with high reproducibility, supporting precise focus control in semiconductor manufacturing equipment. 【Application Scenarios】 - Autofocus control for wafer inspection equipment - Z-axis positioning for optical measurement devices - Focus correction for mask inspection equipment - Fine pattern inspection processes 【Benefits of Implementation】 - Improved inspection accuracy through nano-level focus control - Stable holding of optical systems due to weight compensation features - Enhanced inspection throughput due to fast response - Improved process stability
basic information
**Features** - Adjustable travel range of 7 mm - High dynamics direct drive - Built-in weight compensation function for up to 1 kg (user-adjustable) - Minimum incremental motion of 10 nm - Cross roller guide - Suitable optional accessories such as objective lens holders **Our Strengths** Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide precision positioning solutions tailored to our customers' needs. We offer a wide range of products, including piezo stages, as well as peripheral equipment such as granite bases to support our customers in building their systems.
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Model number/Brand name
V-308 Voice Coil PIFOC
Applications/Examples of results
Microscopes: Multiphoton fluorescence microscope, deep tissue examination, digital slide scanning microscope Biotechnology: Genome sequencing using Solexa-Illumina method, immunoassay fluorescence Medical devices: Ophthalmic scanning laser, automatic cell counter/flow cytometer Biomedical research: Optical and magnetic tweezers Laser material processing: Laser micromachining, laser ablation Semiconductor industry: Semiconductor/wafers inspection
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.