V-62x Series High-Precision Rotary Stage for Semiconductors
Achieves high rigidity with an opening, eccentricity and flatness of less than 1µm.
In the semiconductor manufacturing industry, precise positioning of wafers and masks is a crucial factor that affects product quality and yield. Particularly with advancements in microfabrication technology, there is a demand for higher precision and stability. Low positioning accuracy can lead to processing defects and a decline in device performance. The Direct Drive High-Precision Rotary Stage V-62x series achieves excellent rotational accuracy and minimal tilt error, enabling advanced alignment and rotation control. 【Application Scenarios】 - Wafer probing - Mask alignment - Laser processing - Inspection equipment 【Benefits of Implementation】 - Improved yield through high-precision positioning - Increased productivity through high-speed, high-precision operation - Compatibility with a wide range of fields
basic information
【Features】 - Efficient dynamic performance through direct drive - Motion platform diameters of 85 mm, 110 mm, and 210 mm - Eccentricity and flatness < 1 μm - Slim design 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide precision positioning solutions tailored to our customers' needs. We offer a wide range of products, including piezo stages, as well as peripheral equipment such as granite base plates, and we can also propose complex systems.
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Model number/Brand name
V-62x High-Precision Rotation Stage with Direct Drive
Applications/Examples of results
- Sample inspection - Precision micro-assembly - Research - Biotechnology - Semiconductor inspection and measurement - Automation - Device assembly - Laser micromachining - Sensor calibration and testing *For more details, please refer to the catalog or feel free to contact us.*
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.