PIHera XY Piezo Stage for Semiconductor Technology
Maximum 1800µm long stroke and nano precision. Position measurement without physical contact using a unique capacitive sensor.
In semiconductor manufacturing, precise and stable positioning of wafers and masks is required. Nanometer-level positioning accuracy affects product quality. Positioning errors can lead to reduced yield and product defects. The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability, providing high resolution below 1nm and bidirectional reproducibility of ±0.2nm. 【Application Scenarios】 - Semiconductor manufacturing equipment - Wafer inspection - Mask alignment - Probing 【Benefits of Implementation】 - Improved yield through high-precision positioning - Increased productivity due to stable operation - Ease of integration into equipment due to compact housing - Enhanced maintainability with long-life actuators
basic information
**Features** - Stroke from 50 to 1800 μm - High-precision flexure guide system with no friction - Long lifespan with PICMA® piezo actuators - Available in X, XY, Z, and XYZ versions **Our Strengths** With over 50 years of experience based in Germany, we provide the world’s number one piezo stages and actuators. We propose optimal solutions tailored to our customers' applications and support problem-solving related to positioning. For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.
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Delivery Time
Model number/Brand name
P-620.2 – P-629.2 PIHera XY Piezo Stage
Applications/Examples of results
- Phase shift control in interferometers - Sample position adjustment in confocal/atomic force microscopy - Alignment and scan control at the nanoscale - Precision positioning and assembly of photonic devices - Semiconductor pattern inspection and quality assurance processes - Tracking/active stabilization stages in optical and bio fields *For more details, please refer to the catalog or feel free to contact us.*
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.