B-421BIX Small Piezo-Driven Linear Stage for Semiconductor Manufacturing
Ultra-compact piezo-driven linear stage for semiconductor devices with a maximum stroke of 33mm.
In semiconductor manufacturing processes, high precision and reproducibility are required for the positioning of wafers and masks. Particularly in fine processing and inspection processes, positioning accuracy directly affects product quality and yield. The B-421 BIX miniature linear stage achieves high-resolution positioning through piezoelectric drive, despite its ultra-compact design. It is easy to integrate even in limited equipment space and is suitable for semiconductor devices that require precise position control. It supports a maximum stroke of 33mm, providing a compact and high-performance positioning solution. 【Application Scenes】 - Wafer probing equipment - Mask alignment equipment - Semiconductor inspection equipment - Precision assembly equipment 【Benefits of Implementation】 - Stable process control through high-resolution positioning - Contribution to space-saving of equipment - Improved process stability through high-precision control
basic information
【Features】 - Stroke: 13mm, 23mm, 33mm - Minimum incremental motion: 0.01μm - Maximum load capacity: 0.5kg (horizontal) - Maximum speed: 14mm/s - Compatible controller: E-881 【Our Strengths】 Based on precision control technology developed over more than 50 years at our headquarters in Germany, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide. With a rich lineup and technical expertise, we offer optimal solutions tailored to our customers' needs.
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Model number/Brand name
B-421 BIX Small Piezo Drive Linear Stage
Applications/Examples of results
- Super-resolution microscopy (e.g., TIRF, STORM) - Light sheet microscopy (e.g., grid light sheet) - Microassembly - Photonics - Optical alignment - Beamline equipment - Semiconductor technology - Mobile measurement technology devices (e.g., spectroscopy, interferometry)
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.