All products and services
1～18 item / All 18 items
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Introducing the "Spin Scrub Cleaning Device Series" - High Quality and High Performance!
We will introduce the new model of the automatic scrub cleaning device for mass production, as well as the photo mask cleaning device with a cumulative total of over 200 units in the series.
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New Type UDS Spin Coater (Resist Stripping/Lift-Off System)
Significant reduction in footprint and purchase costs, increased throughput, and substantial improvement in substrate quality.
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Semi-Automatic SPINDip Spin Coater Device - Lift-Off and Resist Stripping
Supports various sizes, board types, and device pattern conditions with the new in-house demo machine! Customizable to an optimal form.
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Vertical & Spin Leaf Lift-Off Device
Can also be used for organic peeling! Significant reduction in filter load can be achieved with cyclones and composite mesh.
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Fully automatic batch processing equipment (substrate regeneration, etching, RCA cleaning, etc.)
High throughput, high reliability, low-cost batch processing equipment.
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New Type Semi-Automatic UDS Spin Sheet Device
Of course, RCA, development, etching, cleaning, stripping, lift-off, etc.! We have a wealth of experience in various process treatments.
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Small Multi-Spin Processor: Etching, Cleaning, Developing
During scanning, uniformity improvement through peripheral speed control is also possible! We have received numerous uses and have a wealth of experience compared to conventional methods.
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Tabletop spin cleaning device
You can achieve high cleaning performance equivalent to that of higher-end models.
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Fully automatic photolithography processing equipment for large substrates
Consistent processing of photolithography is possible.
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Large substrate resist coaters
Of course, the airflow control inside the chamber, along with the excellent maintainability of the resist spin coat unit.
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Semi-Automatic Resist Coater
It is possible to select an optimal acceleration based on the viscosity of the resist coating agent! We also pay attention to maintainability.
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Photo mask cleaning device (semi-auto)
It is a long-selling model with cumulative sales of over 200 units in the series.
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New type UDS spin sheet device (etching, RCA, cleaning, developing, etc.)
Significant reduction in footprint and purchase costs, increased throughput, and substantial improvement in substrate quality.
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New Type SpinDip Processor: Lift-off, Organic Stripping, Deburring
Practical application of ultrasonic ultrasonic technology mounted on a spin sheet device!
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New Type Spin Scrub Automatic Cleaning Device (Post-CMP and Post-Polishing Cleaning)
High-reliability automatic scrub cleaning device for mass production sites
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Spin & conveyor processing equipment (etching, cleaning, stripping)
High-quality substrates can be provided with high throughput and low cost!
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Spin wafer processing equipment (etching, RCA, cleaning, developing, etc.)
A spin sheet device that can obtain high-quality substrates at a low cost.
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Excimer UV surface treatment device
Improving process quality through automated processing combined with wet treatment.
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