◉ 【MiniLab-026】Small Vacuum Deposition Device
◉ 【MiniLab-026】Small Vacuum Deposition Device
◉ Can be stored in a 19-inch single rack frame, allowing for installation in a small space ◉ Equipped with up to 4 organic material deposition sources and up to 2 metal deposition sources ◉ Also available as a glove box integrated model ◉ A wide range of optional parts available This is an entry-level small vacuum deposition device for research and development purposes. It allows for the reconfiguration of metal material deposition sources (TE1-Box type or electrode modules "TE1 to TE4") and can be controlled automatically or manually using the corresponding TEC controller. It offers a variety of options including shutters for substrates and sources, film thickness monitors, vacuum gauges, substrate holders, substrate heating heaters, substrate rotation and lifting stages, and RF/DC bias application. Continuous multilayer film control and simultaneous film deposition (for organic film materials only) are also possible.
31～39 item / All 39 items
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Sputtering device "MiniLab-060"
A semi-custom-made thin film experimental device that can be assembled with the desired configuration for processes such as sputtering, EB (electron beam), and annealing.
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Vacuum Deposition Device "MiniLab-080"
Flexible configuration available upon request for methods such as deposition, sputtering, and EB. Adopts a tall chamber with a height of 570mm, contributing to improved uniformity during deposition.
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Sputtering device 'nanoPVD-S10A'
High-performance, cost-effective RF/DC magnetron sputtering device for research and development.
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Vacuum deposition device 'MiniLab-090' (for glove box)
Storage-compatible glove box PVD flexible thin film experimental device, featuring a tall chamber with a height of 570mm, contributes to improved uniformity during deposition.
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Vacuum Deposition Device "MiniLab Series"
Due to its modular embedded design, it is possible to flexibly assemble dedicated machines according to the required film formation methods. A compact thin-film experimental device that can accommodate various research applications.
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Vacuum Deposition Device "nanoPVD-T15A"
We have incorporated all the latest vacuum deposition technology into a compact benchtop-sized device that can effectively utilize limited lab space.
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Sputtering device 'MiniLab-026'
Compact and space-saving! Ideal for research and development. Flexible configuration for purposes such as deposition, sputtering, and annealing.
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Vacuum Deposition Device "MiniLab-026"
Compact and space-saving! Ideal for research and development, flexible configuration for purposes such as deposition, sputtering, and annealing.
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Annealing furnace "Mini-BENCH-prism ultra-high temperature experimental furnace"
Maximum operating temperature 2000℃ Semi-automatic control Ultra-high temperature experimental furnace (carbon furnace, tungsten metal furnace) Compact and space-saving experimental furnace
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