Vacuum Deposition Device "nanoPVD-T15A"
We have incorporated all the latest vacuum deposition technology into a compact benchtop-sized device that can effectively utilize limited lab space.
High-performance organic source LTE (up to 4 sources) with excellent temperature responsiveness/stability for organic materials such as OLED, OPV, and OTFT, and a metal deposition source TE (up to 2 sources) that allows for easy exchange and maintenance. It can operate in manual mode, as well as in automatic modes for continuous multilayer film deposition and simultaneous film deposition. Despite its compact size, it achieves performance similar to that of standalone large machines without sacrificing basic performance, film quality, uniformity, or operability. Additionally, it features fully automated control via a simple touch panel with PLC. The user-friendly HMI allows anyone to operate it intuitively without requiring complicated operating procedures. It comes with remote software "IntelliLink," which connects to a Windows PC via USB cable, enabling monitoring of the device's operating status, log saving, online/offline recipe creation and saving, and fault analysis. This compact vacuum deposition system is designed to maximize the effective use of limited development and lab space while also excelling in maintenance.
basic information
◉Dimensions: 804(W) x 530(D) x 600(H)mm ◉Weight: 40kg to 70kg (depending on equipment configuration) ◉Excellent basic performance ・Achievable vacuum level 5x10-5 Pascal ・Equipped with high-performance turbo molecular pump ・Up to Φ4 inch substrate ◉Evaporation sources ・Metal evaporation source TE x up to 2 units ・Organic evaporation source LTE x up to 4 units (if mixed with resistive heating TE, up to 2 units) ◉7" touch panel ◉Continuous film deposition ・Automatic control of deposition program ・30 types of recipes registered ・High-precision wide-range vacuum gauge ◉Rich options ・Substrate rotation ・Up and down movement with 300mm stroke ・Substrate shutter ・Dry pump (RP standard) ・Connect to Windows PC via USB for log storage and management
Price information
Please contact us.
Delivery Time
Model number/Brand name
nanoPVD-T15A
Applications/Examples of results
- Development of organic thin films such as OLED, OPV, and OTFT - Industrial applications of optical thin films and decorative films - Development of thin films for electronic substrates and semiconductor substrates - Development of coating materials and thin film materials
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【Endless possibility_thermal engineering...】 Our company sells vacuum thin film devices for semiconductor and electronic device fundamental research, ultra-high temperature heaters for CVD substrate heating, experimental furnaces, temperature measurement equipment, and more. To meet the endless demand for "heat," which is indispensable in any era, and to respond to various requests in the field of fundamental technology development, we aim to introduce the latest equipment and contribute to research and development in Japan.