◉ 【MiniLab-090】Flexible Thin Film Experimental Device

MiniLab-080 is a glove box model designed to accommodate an 80ℓ large volume MiniLab-080 chamber within a glove box bench structure. It features a slide-open and close chamber that maximizes the use of the workbench, and a rear-opening door designed with maintenance in mind. Samples processed can be handled consistently in a controlled environment within the glove box without exposure to the atmosphere or moisture. For specifications of the gas purification unit, please refer to the GB model. - Resistance heating evaporation source x up to 4 - Organic evaporation source x up to 4 - Magnetron sputtering cathode x 4 - Electron beam evaporation - Maximum Φ8 inch heating stage (standard 500℃, Max 1000℃) - RF/DC etching system - CVD (thermal CVD, PECVD)