Energy Dispersive X-ray Spectroscopy (EDS)
Detecting characteristic X-rays! An effective analytical method for obtaining elemental information in micro-regions and small foreign substances.
"Energy Dispersive X-ray Spectroscopy (EDS or EDX)" is a method that detects characteristic X-rays generated by electron beam irradiation using a detector attached to an electron microscope (SEM or TEM), allowing for the acquisition of elemental information about samples or foreign substances. When characteristic X-rays generated by irradiating a material with an electron beam enter the detector, a number of electron-hole pairs equivalent to the energy of the characteristic X-rays are produced. By measuring this number (current), it is possible to determine the energy of the characteristic X-rays, and since the energy varies by element, it is possible to investigate the elemental information of the material. [Analysis by EDS (partial)] ■ Qualitative analysis of intermetallic compounds (point analysis) - By examining which elemental characteristic X-ray energy corresponds to the characteristic X-rays in the measured spectrum, the types of elements can be investigated. ■ Semi-quantitative analysis of intermetallic compounds - By examining the intensity (count number) of each characteristic X-ray, the concentration of the contained elements can be calculated. *For more details, please refer to the PDF document or feel free to contact us.
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【Other EDS Analyses】 ■ Line Analysis - It is possible to profile the concentration distribution of each element along a specified line in the SEM image. - This can be effective for samples with layered compositions. ■ Area Analysis - The distribution of each element can be viewed in two dimensions. - It is also possible to display images with several elements overlaid. *For more details, please refer to the PDF document or feel free to contact us.
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【Purpose】 ■When you want to obtain elemental information about micro areas or micro foreign substances. *For more details, please refer to the PDF document or feel free to contact us.*
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Aites was established in 1993, originating from the quality assurance department of the IBM Japan Yasu office. Based on the technical expertise cultivated through cutting-edge defect analysis and reliability assurance of electronic components at the IBM Japan Yasu office, we have provided various products and services that support the development and manufacturing of semiconductors, displays, organic EL, solar cells, and electronic components to customers both domestically and internationally.