Primerless fluororesin coating for semiconductor components | Cleanroom compatible
Direct film formation without primer! Strongly suppresses outgassing and particle generation under vacuum and thermal environments.
This is a technical case study of a primer-less fluororesin coating called "HYPERCOAT," which does not use a primer (base adhesive) for components used in semiconductor manufacturing equipment that require a clean environment. By completely eliminating the primer layer and enabling direct film formation, it contributes to a higher level of cleanliness and purity within the equipment. **Main Improvement Effects from Implementation** - **Prevention of Impurity Leaching (Outgassing and Metal Ions)** Since no binder (primer) is used for adhesion, it shuts out the leaching of volatile components (outgassing) and metal ions under vacuum and thermal environments, maintaining the high purity of chemicals and processes. - **Reduction of Coating Delamination to Suppress Particle Generation** There is no heterogeneous interface with the underlying layer, which reduces swelling, interfacial delamination, and chipping of the coating due to chemical environments and thermal cycles. This prevents the dispersion of fine particles into the equipment.
basic information
【Construction Technology】Contracted Primerless Fluororesin Coating "HYPERCOAT" 【Technical Features and Functions】 ■ Completely Primerless Structure Ultra-high purity specification due to the absence of adhesive binder resin (low outgassing, low metal ion leaching) ■ No Interface Delamination & Low Dust Generation Reduces the risk of delamination, chipping, and dust generation from the substrate under chemical environments and heating/cooling cycles ■ Excellent Non-Stick Properties Suppresses the adhesion of dirt and chemicals due to the inherent non-adhesive properties of fluororesin. ■ Durability in Semiconductor-Specific Special Environments As a pure fluororesin film, it demonstrates high resistance even in special environments exposed to radicals and plasma during various semiconductor processes. 【Applicable Substrates and Parts】 ■ Various metal semiconductor manufacturing equipment parts such as stainless steel (SUS), aluminum, titanium, etc. ■ Internal components of vacuum chambers, wafer holding jigs, various piping, valves, and sealing surfaces.
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Model number/Brand name
HYPERCOAT
Applications/Examples of results
【Main Application Areas and Equipment】 ■ Semiconductor Front-End Equipment Film deposition equipment (CVD/PVD), dry etching equipment, chamber components of thermal processing furnaces ■ Wafer Cleaning and Liquid Processing Equipment Chemical nozzles, wafer holding rings/carriers, chemical valves and fitting components ■ Vacuum and Ultra-Clean Environments EFEM, vacuum transport robot components, precision sensor protection parts
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Nikken Coating Industry Co., Ltd. has been a specialized manufacturer of functional coatings for contract processing, earning the trust of customers across various industries for 79 years since its founding. We leverage our processing technology to maximize the properties of fluororesins, such as non-stick, lubricity, and chemical resistance, providing high-performance coatings that directly address customer challenges, including "Thermo Pro Release" for thermal welding processes and "NonStick STC" for blades and precision molds. In recent years, in response to movements regarding regulations on fluorinated compounds (PFAS), "PEEK resin," which is gaining attention as a substitute for fluororesins, has become a focus. Nikken Coating Industry commercialized the world's first PEEK resin coating, "PEEKCOAT," in 1999. Based on the solid knowledge and know-how accumulated over more than 20 years, we are further intensifying our research and development efforts to explore the potential of next-generation PEEK coatings! We aim to be recognized as "the go-to for PEEK coatings" and will continue to lead the way. As "the best partner for functional coatings that builds trust through technology," Nikken Coating Industry will continue to contribute to the creation of high-quality, high-performance products.