ピエゾフレクシャステージ/高速スキャニングシステム
ピエゾフレクシャステージ/高速スキャニングシステム
サブナノメートル分解能を実現するピーアイのピエゾナノポジショニングステージ。摩擦ゼロのフレクシャーガイドで高速・高精度位置決めを実現。
31～57 item / All 57 items
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Lens Focus Scanner P-726 for Semiconductor Wafer Inspection
High-load compatible, high-precision Z-focus scanner supporting high throughput in wafer inspection.
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High Load Objective Lens Focus Scanner P-726
A stroke of 100 µm, a system resolution of 0.4 nm, and a resonance frequency of 560 Hz even at a load of 210 g.
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V-308 High Precision Z-Axis Focus Stage for Laser Processing
Minimum 10 nm resolution. High-precision Z-axis focus control of the laser processing head.
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Gravity compensation up to 1kg Voice coil focus stage V-308
High-precision Z-axis supporting fine observation with a minimum movement of 10nm, maximum travel of 7mm, and passive holding up to 1kg.
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Voice Coil Focus Stage V-308 for Semiconductor Manufacturing
Minimum 10 nm resolution, maximum 7 mm stroke. Achieving high-precision Z-axis focus control for semiconductor devices.
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V-308 High-Precision Z-Axis Focus Stage for Optical Microscopes
Minimum 10nm operation, maximum 7mm movement, supports up to 1kg. High-precision Z-axis supporting fine observation.
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V-308 Focus Stage for Biotechnology
Enhancing the accuracy of cell observation and deep imaging — Nano-precision Z-axis focus stage
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P-737 PIFOC Sample Focusing Z Stage
Thin long-stroke piezo Z nanopositioner for microscope specimens. Stroke up to 250μm (customizable up to 500μm).
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P-737 Sample Focusing Z Stage for Microscopes
High-precision PIFOC Z stage for achieving high-speed focusing in microscopes.
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P-737 PIFOC Z Stage for Biotechnology
High-speed, high-resolution piezo Z-focusing stage supporting live cell observation.
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P-736 PiNano Piezo Z Stage for Z-axis Microscope
Piezo Z-stage for high-speed focus control in the 100µm/200µm range
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[Piezostage P-616 for Nanotechnology] XYZ Axis
Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.
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XYZ Axis Piezo Stage P-616 for Laser Processing
A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.
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Optical XYZ Axis Piezo Stage P-616
100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.
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[Piezostage for Microscopes] XYZ Axis P-616
A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.
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[Piezostage for Semiconductor Manufacturing] XYZ Axis P-616
For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.
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XYZ Axis Piezo Stage 100×100×100 µm P-616
Compact XYZ piezo stage with 40mm size and 100µm operation on the XYZ axis.
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P-611.3 for research and industrial applications requiring nano-level positioning.
0.2nm resolution, ultra-compact 44mm cube. Achieves high-speed scanning and high-precision XYZ nanopositioning.
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XYZ Axis Nano-Level Precision Piezo Stage with Aperture P-733
Reproducibility ±1nm, XY axis 100 µm + Z axis 10 µm stroke, optimal for transmitted light with a 50 mm aperture.
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High-Precision Parallel Kinematics P-733.2 for Semiconductor Manufacturing
Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.
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High-precision parallel kinematics for optical adjustment P-733.2
Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.
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[For Measurement] XYZ Axis Precision Positioning Stage P-561~563
PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.
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XYZ axis 300µm operation precision positioning stage P-561~563
Precision positioning at the nano level with a 66 mm opening × maximum 300 µm on the XYZ axis.
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【For Precision Machining】Open Aperture 50mm Piezo Scanner P-517/527
Frictionless flexure guide integrated structure. High-performance scanner supporting precision machining at the nano level.
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[For Measurement] Aperture 50mm Piezo Scanner P-517/527
Zero-friction flexure guide integrated structure. Improved calibration accuracy with high reproducibility nano-positioning.
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Optical Field Piezo Scanner with 50mm Aperture P-517/527
A multi-axis piezo scanner with zero friction that achieves nano-level positioning.
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50 mm aperture multi-axis piezo scanner P-517/527
Integrated structure with zero-friction flexure guide - capable of XY axis, XYZ axis, and XYθz axis motion.
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