Ink mark inspection device
It measures the area of ink marks stably with almost no influence from patterns! A special optical system that accommodates various wafer types.
The device is an automatic inspection system that can measure the area of ink marks stably with minimal influence from patterns. It uses a special optical system that brings out ink with stable detection capability for various wafer types. Measurement can be performed simply by setting the brightness values of the illumination and the binarization level for each wafer type, and it communicates with the prober via GPIB. Additionally, a device that operates with a dedicated XY stage instead of a prober can also be manufactured. 【Features】 ■ Special optical system that brings out ink for various wafer types ■ Stable measurement of ink mark area with minimal influence from patterns ■ Simple setup to determine the brightness values of the illumination and the binarization level ■ Automatic inspection possible via GPIB communication ■ A device with a dedicated XY stage can also be manufactured *For more details, please download the PDF or feel free to contact us.
basic information
【Specifications】 ■ 1.3 million pixel CMOS camera ■ Ink mark imaging optical system (lens, LED lighting) ■ Computer ■ Field of view size: 16mm x 16mm MAP display ■ Minimum ink mark size: φ100μ or larger *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Purpose】 ■Automatic inspection of ink marks on wafers *For more details, please download the PDF or feel free to contact us.
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Since our company's establishment in 1986, we have long been engaged in semiconductor-related businesses that support Japan's cutting-edge technology. On the hardware side, we have developed construction and manufacturing environments, including clean rooms. On the human resources side, we have focused on training semiconductor engineers and establishing a service system that can promptly respond to customer needs. Last year, we participated in SEMICON Japan for the first time, and by directly interacting with many industry stakeholders, we were able to learn again what is currently needed and what services should be created. At the same time, the morale within the company has been rising, and we are actively conducting sales activities. It is said that the Japanese economy is finally showing signs of recovery. However, even just looking at the semiconductor industry, the entry of overseas manufacturers and the significant improvement in technology and services are remarkable, so we aim to enhance our international competitiveness in our sales expansion. Not only domestically but also in response to the era of globalization, our role as a hub connecting North America and Asia, especially given our excellent airport access, will further increase.