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Wafer Internal Crack Inspection Device

Products after inspection can be guaranteed for quality! A wafer internal crack inspection device that captures invisible information and performs automatic judgment.

This product is a wafer internal crack inspection device that inspects internal cracks in the notch portion of semiconductor wafers using an SWIR camera. By utilizing an SWIR camera that can capture information not visible to the naked eye, it enables automatic data storage of inspection results, automatic classification of good/bad products, and alert output in the event of defects. Products inspected can be guaranteed for quality, and it accommodates everything from manual machines with hand loading to fully automated machines that operate 24 hours a day. 【Features】 ■ Inspects internal cracks in the notch portion of semiconductor wafers ■ Employs an SWIR camera capable of capturing information not visible to the eye ■ Enables automatic data storage and automatic classification of inspection results (good/bad) ■ Automatic alert output function in the event of defects ■ Accommodates everything from manual machines with hand loading to fully automated machines that operate 24 hours a day *For more details, please download the PDF or feel free to contact us.

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basic information

【Configuration】 <Including rotating mechanism> ■ Scaler OP: 1.1/1.4-inch camera ■ Telecentric lens ■ Spot light source (including power supply) ■ θ stage (rotation angle 360 degrees) ■ Rotating housing ■ Camera lighting platform ■ Computer for image processing (monitor) ■ Emergency stop button <Image Section> ■ Camera: SWIR camera ■ Lens: Telecentric magnification 2x ■ Lighting: SWIR LED light ■ Lighting power supply: USB control via PC ■ Field of view size: Approximately 4.48mm x 3.36mm ■ Image composition function: X, Y axis and rotation ■ Pixel resolution: Approximately 1.6um/pixel ■ CAD comparison inspection: Optional *For more details, please download the PDF or feel free to contact us.

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【Purpose】 ■Internal crack inspection of the notch part of semiconductor wafers *For more details, please download the PDF or feel free to contact us.

Wafer Internal Crack Inspection Device

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Since our company's establishment in 1986, we have long been engaged in semiconductor-related businesses that support Japan's cutting-edge technology. On the hardware side, we have developed construction and manufacturing environments, including clean rooms. On the human resources side, we have focused on training semiconductor engineers and establishing a service system that can promptly respond to customer needs. Last year, we participated in SEMICON Japan for the first time, and by directly interacting with many industry stakeholders, we were able to learn again what is currently needed and what services should be created. At the same time, the morale within the company has been rising, and we are actively conducting sales activities. It is said that the Japanese economy is finally showing signs of recovery. However, even just looking at the semiconductor industry, the entry of overseas manufacturers and the significant improvement in technology and services are remarkable, so we aim to enhance our international competitiveness in our sales expansion. Not only domestically but also in response to the era of globalization, our role as a hub connecting North America and Asia, especially given our excellent airport access, will further increase.