Fully automatic 12-inch compatible profiler 'WEIM-12F'
Achieving high-precision and high-speed automatic measurement! Fully automatic profiler and composite inspection machine compatible with inline management.
The "WEIM-12F" is a fully automatic profiler inspection machine compatible with FUPE, capable of high-precision and high-speed automatic measurements. It retrieves wafers using a robot with a double-hand inversion mechanism, aligns them, and then measures wafer thickness, diameter, notch, and profiler measurements before storing them. It is a system that allows inline management via MELCEC-net communication. 【Features】 ■ High-precision, high-speed automatic measurements ■ Two laser displacement meters measure the thickness at the center and outer edge of the wafer ■ Two width and diameter measurement devices measure the outer diameter of the wafer using the diameter method ■ Two optical cameras measure the notch and notch displacement of glass/Si from both sides *For more details, please download the PDF or feel free to contact us.
basic information
【Specifications】 ■Repeatability: ±1μm ■Angle: 0.1° ■Cycle time: 50 seconds per sheet ■Profiler measurement items: Thickness T, chamfer width, height, R shape, trimming width/length, bonding thickness/offset ■Standards compliance: ISO1705 compliant ■Standard accessories: Calibration wafer included *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Target】 ■Si wafer ■Glass wafer ■Glass-Si bonding *For more details, please download the PDF or feel free to contact us.
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Since our company's establishment in 1986, we have long been engaged in semiconductor-related businesses that support Japan's cutting-edge technology. On the hardware side, we have developed construction and manufacturing environments, including clean rooms. On the human resources side, we have focused on training semiconductor engineers and establishing a service system that can promptly respond to customer needs. Last year, we participated in SEMICON Japan for the first time, and by directly interacting with many industry stakeholders, we were able to learn again what is currently needed and what services should be created. At the same time, the morale within the company has been rising, and we are actively conducting sales activities. It is said that the Japanese economy is finally showing signs of recovery. However, even just looking at the semiconductor industry, the entry of overseas manufacturers and the significant improvement in technology and services are remarkable, so we aim to enhance our international competitiveness in our sales expansion. Not only domestically but also in response to the era of globalization, our role as a hub connecting North America and Asia, especially given our excellent airport access, will further increase.