Positioning challenges in a vacuum environment. List of PI's vacuum-compatible products.

Products compatible with vacuum environments, from hexapods to stages and piezos.

last updated Mar 17, 2026

P-611.3 for research and industrial applications requiring nano-level positioning.

0.2nm resolution, ultra-compact 44mm cube. Achieves high-speed scanning and high-precision XYZ nanopositioning.

last updated Mar 11, 2026

High-precision rotating module A-60x adopting non-contact air bearing technology

Air bearing module that achieves ultra-high precision rotation with zero friction.

last updated Mar 11, 2026

Direct Position Measurement / Clear Aperture Compatible P-733Z

High-rigidity piezo Z-stage achieving 0.3 nm resolution and high-speed response.

last updated Mar 11, 2026

P-736 PiNano Piezo Z Stage for Z-axis Microscope

Piezo Z-stage for high-speed focus control in the 100µm/200µm range

last updated Mar 11, 2026

High-precision Z stage L-306 compatible with compact design and multi-axis system construction.

Compact high-precision Z stage with a 13mm stroke.

last updated Mar 11, 2026

Capacitance Sensor D-510 for Semiconductor Device Nano Displacement Measurement

Sub-nanometer resolution and a maximum bandwidth of 10 kHz. Non-contact capacitive sensor ideal for wafer position control.

last updated Mar 16, 2026

Sub-nanometer resolution capacitive displacement sensor D-510 for precision machinery

Non-contact displacement measurement with sub-nanometer resolution. Contributing to position control and improved machining accuracy of precision processing equipment.

last updated Mar 16, 2026

D-510 Sub-Nanometer Resolution Capacitive Displacement Sensor for Research and Development

Achieving sub-nanometer resolution and a maximum bandwidth of 10 kHz for non-contact displacement measurement at the nano level.

last updated Mar 16, 2026

High-Resolution Capacitive Sensors for Precision Machinery D-050・D-100

Non-contact displacement sensor with a measurement range of up to 300µm and a resolution of 0.01nm.

last updated Mar 16, 2026

High-Resolution Capacitive Sensors for Nanotechnology D-050・D-100

Achieving nano displacement measurement with sub-nanometer resolution. An optimal non-contact displacement sensor for nano material evaluation and nano positioning.

last updated Mar 16, 2026

X-365 High-Precision Modular XY Gantry System

XY mechanism that combines precision, rigidity, and flexibility.

last updated Feb 26, 2026

[For Research and Development] Compact Linear Stage - Vacuum Compatible M-11x

Compact linear stage compatible with XYZ axis, size 60mm square.

last updated Mar 11, 2026

[For Optical Adjustment] Vacuum-Compatible Small Linear Stage M-11x

Compact linear stage with a size of 60mm square, compatible with XYZ axes.

last updated Mar 11, 2026

Linear Actuator N-472 for Microscope Focus

Long-term stabilization of microscope focus with inertial drive and position feedback.

last updated Mar 12, 2026

Linear Actuator N-472 for Optical Adjustment

Long-term stable optical fine-tuning with inertial drive and position feedback.

last updated Mar 12, 2026

Linear actuator N-470 for focus adjustment in microscopes.

Precise control of microscope focus with a maximum stroke of 13 mm.

last updated Mar 12, 2026

N-470 Linear Actuator Ideal for Fine Adjustments for Optical Adjustments

Compact actuator with high holding force, ideal for fine adjustment of mirrors and optical elements.

last updated Mar 12, 2026

Piezo Nano Positioning Actuator N-216 for Semiconductors

Achieving a holding force of up to 800N and a resolution of 5nm. High-thrust piezo drive supporting high-precision positioning in semiconductor manufacturing equipment.

last updated Mar 16, 2026

High-load linear stage V-817 for optical adjustment, with a maximum load of 600N.

Smooth and high-speed response even under high load of 600N with linear motor × high-precision encoder.

last updated Mar 12, 2026

High-Precision XY Axis Linear Motor Stage for Microscopes V-P01

High-Precision XY Stage V-P01 for Microscope Observation and Automatic Imaging

last updated Mar 10, 2026

High-Precision Z-Axis Voice Coil Motor Stage V-Z03 for Research and Development

Achieves sub-micron level precision Z-axis control with high-speed response and high rigidity.

last updated Mar 10, 2026

High Rigidity and High Precision Z Stage for Semiconductor Inspection V-Z03

Improving the quality and efficiency of semiconductor inspection with high-speed, high-precision Z-axis control.

last updated Mar 18, 2026

High-load linear motor stage for laser microfabrication V-D07

Precision and smooth adjustment work for optical instruments. High-precision linear stage.

last updated Mar 10, 2026

NanoCube 6-Axis Piezo System for Optical Applications

Achieving fine adjustment of optical systems with 6-axis nanopositioning.

last updated Feb 25, 2026

Optical Phase Shifter S-312 for Research and Development

Interferometer - Open-loop Z stage for optical phase control

last updated Feb 24, 2026

Optical Phase Shifter for Optical Applications S-312

Open-loop Z-stage for phase control in optical interferometers

last updated Feb 24, 2026

[B-421 BIX Small Piezo-Driven Linear Stage for Research and Development]

Supports research and development applications | Ultra-compact piezo stage with a maximum stroke of 33mm

last updated Mar 12, 2026

B-421 BIX Small Piezo-Driven Linear Stage for Optical Adjustment

Ultra-compact piezo-driven linear stage for precise alignment of optical systems.

last updated Mar 12, 2026

B-421BIX Small Piezo-Driven Linear Stage for Semiconductor Manufacturing

Ultra-compact piezo-driven linear stage for semiconductor devices with a maximum stroke of 33mm.

last updated Mar 12, 2026