H-840 Hexapod System for Manufacturing Industry

±50 mm / ±30° compatible - High-speed 6-axis controlled hexapod

last updated Feb 20, 2026

[For Research] H-840 Hexapod System

Compact hexapod achieving high-speed 6-axis control.

last updated Feb 20, 2026

PI Japan Co., Ltd. 6-axis stage

Achieve reliable operation while minimizing friction! Usable in micro-manufacturing, medical technology, and tool control!

last updated May 23, 2026

N-310 NEXACT OEM Miniature Linear Motor

Compact and high-speed PiezoWalk(R) drive. Standard stroke of 20mm! Compact and cost-effective design.

last updated Jun 06, 2026

N-111 for precision positioning, semiconductor technology, and wafer inspection for semiconductors.

Long-distance nanopositioning PiezoWalk® drive. High resolution and compact design.

last updated Mar 16, 2026

N-111 NEXLINE OEM Linear Motor/Actuator

PiezoWalk(R) drive for long-distance nanopositioning. Compact with a stroke of up to 5mm, high resolution, and a generated force of up to 40N.

last updated Jun 06, 2026

Optical Large Deflection Angle Piezo Chip Tilt Platform S-330

High dynamics chip tilt stage ideal for high-speed steering mirror applications.

last updated Mar 17, 2026

S-330 piezo chip / tilt platform

High dynamic range and large motion angle piezo chips / tilt platform enable high-speed steering mirrors.

last updated Jun 02, 2026

High-precision Z stage for nano positioning with 0.1nm resolution

0.1 nm resolution and 0.02% linearity. Improved manufacturing and measurement accuracy with sub-nanometer Z-axis control.

last updated Feb 25, 2026

[For Semiconductors] PIHera High-Precision Z-Axis Stage with 0.1 nm Resolution

Provides sub-nanometer resolution. 0.1nm resolution and high linearity vertical positioning.

last updated Feb 25, 2026

Sub-nanometer Z-axis nanopositioner P-620.Z to P-622.Z

0.1 nm resolution × 0.02% linearity. High-speed servo control of 50-250 µm with zero friction.

last updated Jun 03, 2026

Z-chip tilt aperture piezo stage for photonics

Optimize alignment in the field of photonics with nano-level operation and large apertures.

last updated Mar 23, 2026

P-5x8 Piezo Stage with Z Chip Tilt Aperture for Precision Measurement

Achieving nano-level Z-chip tilt control. High-precision piezo stage with a 66mm aperture.

last updated Feb 19, 2026

P-5x8 Piezo Stage with Z Chip Tilt Aperture for Scanning Microscopy

Nano-level scanning supporting high magnification observation. Z-chip tilt piezo stage with a 66mm aperture.

last updated Feb 19, 2026

P-5x8 Piezo Stage with Z Chip Tilt Aperture for Optical Adjustment

Piezo stage with an opening that achieves nano-level adjustments.

last updated Feb 19, 2026

Z-chip tilt opening piezo stage P-5x8

The nano-level motion amount is 100µm and 200µm on the Z-axis, with chip tilt axes of 1mrad and 2mrad, and is optimal for transmitted light with a 66mm aperture.

last updated Jun 03, 2026

[For Precision Measurement] 44mm Square Compact Piezo Stage P-611.Z

A 44mm square casing that achieves height measurement at the nanometer level.

last updated Mar 17, 2026

Optical Use: Maximum Resolution 0.2nm Piezo Stage P-611.Z

A 44mm square housing that achieves optical system focus adjustment at the nanometer level.

last updated Mar 17, 2026

P-611.Z Piezo Z Stage

Compact nanopositioner. It is a piezo-based nanopositioning system featuring a closed-loop stroke of 100 μm.

last updated Jun 03, 2026

[For Measurement] XYZ Axis Precision Positioning Stage P-561~563

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

last updated Feb 25, 2026

PIMars XYZ Axis Aperture Piezo Stage for Microscopes

PIMars XYZ Nano Stage that achieves sample positioning for microscopes with nanometer precision.

last updated Feb 25, 2026

XYZ axis 300µm operation precision positioning stage P-561~563

Precision positioning at the nano level with a 66 mm opening × maximum 300 µm on the XYZ axis.

last updated Jun 22, 2026

Compact 2-Axis Nanopositioner for Optical Adjustment

44mm square, maximum stroke of 120µm, high-precision nanopositioner with 0.2nm resolution.

last updated Mar 30, 2026

Piezo Nanopositioner for Semiconductor Manufacturing Equipment

Compact design with a 44 mm square. Piezo nano-positioning stage achieving a 120 µm operating range and 0.2 nm resolution.

last updated Mar 16, 2026

P-611.XZ, P-611.2 XZ, and XZ Nanopositioner

A compact 2-axis piezo system for nano positioning. A flexure guide nano positioning system with a footprint of 44x44mm.

last updated Jun 03, 2026

[Piezoscanner P-734] Optimal XY Piezoscanner for Scanning Microscopes

Flatness of 5 nm, resolution of 0.3 nm, achieving high-speed and high-precision operation with an XY-axis piezo scanner.

last updated Mar 06, 2026

P-734 XY Piezo Scanner

A high dynamic system with a center opening that suppresses vibration to the limit. It achieves a linear stroke of 100 x 100 μm.

last updated Jun 03, 2026

High-precision parallel kinematics for optical adjustment P-733.2

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.

last updated Feb 19, 2026

High-Precision Parallel Kinematics P-733.2 for Semiconductor Manufacturing

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.

last updated Feb 19, 2026

XYZ Axis Nano-Level Precision Piezo Stage with Aperture P-733

Reproducibility ±1nm, XY axis 100 µm + Z axis 10 µm stroke, optimal for transmitted light with a 50 mm aperture.

last updated Jun 03, 2026