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[Analysis Case] Evaluation of Depth Distribution of Alkali Metals in SiO2 Using SIMS

High-precision distribution evaluation of alkali metals through sample cooling.

When measuring the distribution of alkali metals in SiO2 under general analytical conditions, it is known that changes occur in the depth profile concentration distribution due to influences such as the electric field caused by the measurement. In MST, by cooling the sample during SIMS measurements, we suppress changes in the concentration distribution of alkali metals and evaluate the concentration distribution with higher accuracy.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/13…

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Analysis of LSI, memory, and electronic components.

[Analysis Case] Evaluation of Depth Distribution of Alkali Metals in SiO2 by SIMS_C0208

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