[Analysis Case] Evaluation of Depth Distribution of Alkali Metals in SiO2 Using SIMS

High-precision distribution evaluation of alkali metals through sample cooling.

last updated Mar 13, 2025

[Analysis Case] Wide-Area Cross-Section Observation of Bumps

Wide-area observation of micro-specific locations is possible through cross-section preparation using ion polishing.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Ultra-Shallow Implant Profiles by SIMS

Evaluation of dopant distribution and junctions is possible even in extremely shallow regions.

last updated Mar 13, 2025

[Analysis Case] Investigation of Contamination Causes on Silicon Wafers

Evaluation of contamination originating from gloves

last updated Mar 13, 2025

[Analysis Case] Evaluation of the Surface Silanol Groups

Quantitative evaluation of silanol groups is possible with TOF-SIMS.

last updated Mar 13, 2025

[Analysis Case] Analysis of H termination on Si surface

Qualitative and relative comparison of SiH and states on the Si surface due to differences in processing.

last updated Mar 13, 2025

[Analysis Case] Composition and Thickness Evaluation of Ultra-Thin SiON Films

Estimation of film thickness using the average free path of photoelectrons.

last updated Mar 13, 2025

FIB low acceleration processing

FIB: Focused Ion Beam Processing

last updated Mar 12, 2025

Pre-treatment and measurement under high purity atmosphere.

XPS: X-ray photoelectron spectroscopy, etc.

last updated Mar 12, 2025

[Analysis Case] Evaluation of "Water" in Si Oxide Films and ITO Films using SIMS

Depth-direction analysis of hydrogen using 'heavy water (D2O) treatment'

last updated Mar 13, 2025

[Analysis Case] Qualitative Analysis of Epoxy Resin

Estimation of components is possible through TOF-SIMS analysis.

last updated Mar 13, 2025

Distortion evaluation using SEM equipment

EBSD: Electron Backscatter Diffraction

last updated Mar 12, 2025

[Analysis Case] Identification of Fluorine-based Lubricants and Polymers using TOF-SIMS

Identify the contaminating components and estimate the contamination occurrence process.

last updated Mar 13, 2025

[Analysis Case] Preprocessing Technology for Specific Areas of Wafers and Chips

We will sample only the target area and produce samples without breaking the wafer.

last updated Mar 13, 2025

[Analysis Case] Investigation of Curing Temperature and Glass Transition Temperature of Epoxy Resin

Evaluation of thermal properties by DSC (Differential Scanning Calorimetry) measurement.

last updated Mar 13, 2025

[Analysis Case] Depth Direction Analysis of Polyimide Components

Evaluation of the depth direction of surface modification layers of polymers, resins, and films using TOF-SIMS is possible.

last updated Mar 13, 2025

[Analysis Case] Investigation of the Causes of Wettability Changes Due to Plasma Treatment

Evaluation of the top surface of modified layers of polymers, resins, and films using TOF-SIMS is possible.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Crystal Structure by Micro XRD Analysis

XRD measurements in micro areas are possible.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Impurities in Metal Wires

Visualizing the in-plane distribution of impurities such as atmospheric components with a field equivalent to SEM.

last updated Mar 13, 2025

[Analysis Case] SIMS Measurement of Specially Shaped Samples

Analysis is possible even for special shapes through innovative fixing methods.

last updated Mar 13, 2025

[Analysis Case] Evaluation of the Cleaning Effect of Organic Ingredients

You can measure the 300mm wafer as it is.

last updated Mar 13, 2025

Analysis case: Evaluation of the in-plane distribution of additives in solder alloys.

Capable of highly sensitive evaluation of the distribution of additives at the ppm level.

last updated Mar 13, 2025

Analysis of crystal grains below 30nm using the EBSD method.

EBSD: Electron Backscatter Diffraction

last updated Mar 12, 2025

Interference peak removal process in quantitative analysis

X-ray photoelectron spectroscopy (XPS)

last updated Mar 12, 2025

[Analysis Case] Structural Evaluation of Magnetic Head MTJ Section

High-resolution TEM observation using Cs-corrected TEM

last updated Mar 13, 2025

[Analysis Case] Quantification of Hydroxyl Groups by Chemical Modification XPS

Evaluation of Hydroxyl Groups in Polymer Films

last updated Mar 13, 2025

[Analysis Case] Evaluation of Distribution State and Component Analysis of Fluorine-based Films

Evaluation of distribution uniformity and identification/estimation of organic matter through surface analysis of microdomains.

last updated Mar 13, 2025

[Analysis Case] Evaluation of the Degradation Layer of Polycarbonate

It is possible to evaluate the film thickness of the degraded layer using the GCIB (Ar cluster).

last updated Mar 13, 2025

[Analysis Case] Analysis of Smartphone Sealants by Pyrolysis GC/MS

Analysis of UV-curable materials is possible through two-stage heating.

last updated Mar 13, 2025

[Analysis Case] Foreign Substance Analysis Using Micro-Sampling Tools

Identifies the components of foreign substances without the influence of the substrate or base material.

last updated Mar 13, 2025