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Analysis of crystal grains below 30nm using the EBSD method.

EBSD: Electron Backscatter Diffraction

By conducting EBSD analysis on thinned samples, higher spatial resolution can be achieved compared to conventional bulk samples.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/94…

basic information

For detailed data, please refer to the catalog.

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Applications/Examples of results

Analysis of LSI, memory, and electronic components.

Analysis of crystal grains below 30nm using the EBSD method_B0188

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