[Measurement Method] Electron Microscopy Observation and Analysis
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[Measurement Method] Electron Microscopy Observation and Analysis
◆AES (Auger Electron Spectroscopy) ◆SEM (Scanning Electron Microscopy) ◆EBIC (Electron Beam Induced Current) ◆EBSD (Electron Backscatter Diffraction) ◆EDX (Energy Dispersive X-ray Spectroscopy) ◆EPMA (Electron Probe Microanalysis) ◆TEM (Transmission Electron Microscopy) ◆EELS (Electron Energy Loss Spectroscopy) ◆SIM (Scanning Ion Microscopy)
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[AES] Auger Electron Spectroscopy
By measuring the kinetic energy distribution of Auger electrons emitted by electron beam irradiation, insights can be gained regarding the types and quantities of elements present on the sample surface.
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Scanning Electron Microscopy (SEM)
High magnification observation (up to about 300,000 times) is possible.
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[EBIC] Electron Beam Induced Current
A method to obtain information about the electric field structure inside the sample (junction structure of semiconductors).
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[EBSD] Electron Backscatter Diffraction Method
It is possible to easily obtain crystal information over a wide area.
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[SEM-EDX] Energy Dispersive X-ray Spectroscopy (SEM)
It is a method for conducting elemental analysis and compositional analysis by detecting characteristic X-rays generated by electron beam irradiation and spectrally analyzing them by energy.
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[Slice&View] Three-Dimensional SEM Observation Method
By repeatedly performing cross-sectioning processing with FIB and observation with SEM, and reconstructing the obtained images, three-dimensional structural information can be obtained.
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(S)TEM (Scanning Transmission Electron Microscopy)
Elemental analysis, state evaluation, particle size analysis, and acquisition of three-dimensional structural images at the nanoscale.
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[TEM-EELS] Electron Energy Loss Spectroscopy
By measuring the energy lost due to interactions with atoms as electrons pass through thin film samples, the constituent elements and electronic structure of the material can be analyzed.
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[ED] Electron Diffraction Method
ED is a method for investigating crystal structures from diffraction patterns obtained by irradiating a sample with an electron beam.
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[SIM] Scanning Ion Microscopy Method
Observation of SIM images is possible with high resolution (accelerating voltage 30kV: 4nm).
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[TEM-EDX] Energy Dispersive X-ray Spectroscopy (TEM)
EDX is a method that measures the energy and occurrence of characteristic X-rays generated when an electron beam is irradiated onto the analysis area, allowing for elemental analysis and compositional analysis.
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[Analysis Case] Degradation Analysis of Liquid Crystal Displays
We will comprehensively evaluate liquid crystals, alignment films, sealing materials, TFTs, and more.
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[Analysis Case] Cell Cycle Assessment from Bacterial Images
By using deep learning and data analysis, we can evaluate sample characteristics by utilizing large amounts of data.
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[TEM ED-Map] TEM Electron Diffraction Mapping Method
This is a method for analyzing the orientation distribution of crystalline samples using electron diffraction in a transmission electron microscope (TEM).
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[Analysis Case] Evaluation of Two-Dimensional Electron Gas Layer in Normally Off GaN HEMT
We can offer a one-stop solution for comprehensive analysis of product research.
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[Analysis Case] Trench-type Si-MOSFET IDSS Leakage Location Analysis
One-stop service from identifying device defects to analyzing causes.
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[Analysis Case] Failure Analysis of SiC Transistor using Slice & View
Check the leak path by 3D visualization of SEM images.
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[Analysis Case] Component Analysis of Leakage Areas in SiC Power Transistors
It is possible to perform magnified observation and EDX analysis at the gate destruction location identified by Slice & View.
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[EPMA] Electron Probe Micro Analyzer
By analyzing the characteristic X-rays generated when a finely focused electron beam is irradiated onto the surface of a solid sample in a vacuum, insights can be gained regarding the identification of elements and quantitative values.
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Identification of resistance anomalies due to absorption current
You can identify high resistance and open areas in the wiring from the absorption current image.
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Structural analysis using Xe-plasma FIB.
Precision processing/structural evaluation is possible over a wide area of several hundred micrometers.
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[Analysis Case] Lithium-ion Secondary Battery
Accurate evaluation of the separator cross-sectional shape through sample cooling.
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[Analysis Case] STEM, EBSD Image Simulation for Polycrystalline Structure Analysis
Evaluation of crystal forms using simulations.
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[Analysis Case] Analysis of All-Solid-State Batteries
Comprehensive analytical evaluation combining structure, composition, and electrical properties.
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[Analysis Case] Structural Evaluation of Secondary Battery Separators
Evaluation of the shape and composition of organic/inorganic multilayer structures.
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[Analysis Case] Evaluation of Resistance Values and Li Distribution in Secondary Battery Cathodes
Distribution of resistance values in the electrode cross-section, visualization of conduction paths, and comparison with ion distribution.
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[Analysis Case] Comprehensive Evaluation of Positive Electrode Active Materials in Secondary Batteries
Proposing an evaluation that combines structure, composition, and electricity to solve development issues.
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