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[EBSD] Electron Backscatter Diffraction Method

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[EBSD] Electron Backscatter Diffraction Method

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It is possible to easily obtain crystal information over a wide area.

This is a method for orientation analysis of crystalline samples using EBSD. It allows for easier and broader acquisition of crystal information compared to electron diffraction methods. EBSP: Electron Backscatter Pattern, also referred to as SEM-OIM or OIM. - Measurement of the surface orientation of single crystal grains is possible. - Orientation measurement of the measurement area is possible. - Observation of crystal grain size is possible. - Observation of twin grain boundaries (corresponding grain boundaries) is possible. - Extraction of specific crystal orientations is possible. - Measurement of the rotation angle of adjacent crystal grains is possible. - Evaluation of grains larger than 10 nm is possible using transmission methods.

Related Link - https://www.mst.or.jp/method/tabid/145/Default.asp…

basic information

When an electron beam is irradiated onto a sample inclined at approximately 60 to 70 degrees, diffracted electron beams are generated at each crystal plane in a region of about 50 nm or less from the sample surface. By analyzing this backscattered electron diffraction, information about the orientation analysis of crystalline samples can be obtained.

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Applications/Examples of results

- Evaluation of crystal grains in CIGS films (polycrystalline solar cells) - Measurement of lattice strain using SEM equipment - Observation of crystal grains in semiconductor device metal wiring - Investigation of crystal grain boundaries around voids - Crystal analysis of poly-Si TFT - Evaluation of crystallinity of unknown layers in alloy layers - Measurement of whisker orientation from cross-sections - Exploration of optimal conditions in metal material growth (film formation) technology - Analysis of time-dependent changes in metal thin films

Detailed information

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