[Analysis Case] Evaluation of Element Distribution in Oxide ReRAM Operating Area Using SIMS

High-sensitivity evaluation of local elemental distribution in oxide devices using oxygen isotopes.

最終更新日 Mar 13, 2025

X-ray diffraction measurement using a 2D detector

XRD: X-ray diffraction method

最終更新日 Mar 12, 2025

[Analysis Case] Evaluation of Ultra-Shallow Implant Profiles by SIMS

Evaluation of dopant distribution and junctions is possible even in extremely shallow regions.

最終更新日 Mar 13, 2025

[Analysis Case] Composition and Thickness Evaluation of Ultra-Thin SiON Films

Estimation of film thickness using the average free path of photoelectrons.

最終更新日 Mar 13, 2025

[Analysis Case] IGZO

Case studies of XRD and XRR analysis of oxide semiconductors.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of Si Natural Oxidation Film Thickness

Estimation of film thickness using the average free path of photoelectrons.

最終更新日 Mar 13, 2025

[Analysis Case] Composite Evaluation of Zn-based Buffer Layer Using X-rays

Evaluation of composition, bonding state, structure, and density is possible.

最終更新日 Mar 13, 2025

[Analysis Case] Local Structure Analysis of IGZO Thin Films by XAFS

Evaluation of valence, coordination number, and structural order of metal elements in oxide semiconductors.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of H Concentration in IGZO Film

It is possible to evaluate the depth distribution of H in the IGZO film with high sensitivity.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of Ti Diffusion into IGZO Film

Measurement avoiding the influence of high concentration layers using SSDP-SIMS.

最終更新日 Mar 13, 2025

[Analysis Case] Local Crystal Structure Analysis of IGZO Film

Continuous evaluation of crystallinity and orientation using electron diffraction.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of the Chemical State of IGZO Film

Evaluation of bonding state and electronic state using XPS and UPS.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of Composition and Bonding State of GaN Film by XPS

Evaluation will be conducted under measurement conditions tailored to the purpose.

最終更新日 Mar 13, 2025

[Analysis Case] Removal of Organic Contaminants by Etching

We will remove surface contamination and conduct an evaluation using XPS.

最終更新日 Mar 13, 2025

Valence evaluation of metal oxides by chemical shift

XPS: X-ray Photoelectron Spectroscopy

最終更新日 Mar 12, 2025

Types and Characteristics of Electron Diffraction

TEM: Transmission Electron Microscopy

最終更新日 Mar 12, 2025

[Analysis Case] Evaluation of Metal Element Concentration Near the Surface of Gallium Oxide Ga2O3 Film

High sensitivity analysis even in extremely shallow areas.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of Silicon Oxide Film by XAFS

Local structural analysis around silicon, quantification of intermediate oxides, evaluation of bulk and interfaces.

最終更新日 Mar 13, 2025

[Analysis Case] Band Gap Evaluation of Oxidized and Nitrided Thin Films

High-precision band gap evaluation is possible through combined analysis of XAFS and XPS.

最終更新日 Mar 13, 2025

[Analysis Case] Observation of Crystal Structure of Multicomponent Metallic Nanoparticles by TEM

Ultra-high resolution STEM observation of InGaZnO4 particles

最終更新日 Mar 13, 2025

[Analysis Case] Identification of Pyrolysis Products by High-Temperature XRD

XRD measurement can be performed while increasing the temperature.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of Metal Films by High-Temperature XRD

Tracking evaluation of phase transitions and crystallinity changes during the heating process.

最終更新日 Mar 13, 2025

Evaluation of organic contamination using a wafer analyzer with GC-MS.

GC/MS: Gas Chromatography-Mass Spectrometry

最終更新日 Mar 12, 2025

Examples of TDS analysis by representative materials and purposes

TDS: Thermal Desorption Gas Analysis Method

最終更新日 Mar 12, 2025

[Analysis Case] Evaluation of the Skin Permeability of Melbromin

Information about valence bands and intra-gap levels can be obtained by element.

最終更新日 Mar 14, 2025

[Analysis Case] Evaluation of Band Structure by X-ray Absorption and Emission Spectroscopy

Detailed information about the valence band, conduction band, and gap states of the material can be obtained.

最終更新日 Mar 13, 2025

Regarding interface and depth direction resolution

SIMS: Secondary Ion Mass Spectrometry

最終更新日 Mar 12, 2025

Evaluation methods for organic compounds in clean rooms

GC/MS: Gas Chromatography-Mass Spectrometry

最終更新日 Mar 12, 2025

[Analysis Case] Valence Evaluation of Trace Metals in Ceramic Materials

It is possible to evaluate trace metals in ppm orders.

最終更新日 Mar 13, 2025

AFM Data Collection

AFM: Atomic Force Microscopy Method

最終更新日 Mar 12, 2025