[Analysis Case] Observation of Crystal Structure of Multicomponent Metallic Nanoparticles by TEM
Ultra-high resolution STEM observation of InGaZnO4 particles
The STEM device equipped with a Cs collector (spherical aberration correction function) enables ultra-high-resolution observation (resolution of 0.10 nm). The HAADF*-STEM image, which is sensitive to atomic weight, is an effective tool for directly understanding multi-component crystal structures. In this study, we evaluated micro-particles in oxide semiconductors, which can be applied to the atomic arrangement at heterogeneous material interfaces and compound interfaces, as well as grain boundary segregation assessments. *High-Angle Annular Dark-Field: Contrast is obtained that is proportional to atomic weight (Z).
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Applications/Examples of results
Analysis of oxide semiconductors.