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Evaluation of organic contamination using a wafer analyzer with GC-MS.

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Evaluation of organic contamination using a wafer analyzer with GC-MS.

GC/MS: Gas Chromatography-Mass Spectrometry

The WA (Wafer Analyzer) is a device that heats wafers with a diameter of φ76 to 300mm to elevate their temperature, gasifying organic contaminants adhered to the wafer surface and trapping them in a collection tube. As a result, it can concentrate compounds such as phthalate esters and cyclic siloxanes, which are considered causes of device characteristic impacts and manufacturing troubles, allowing for high-sensitivity measurement using GC/MS. Quantification using hexadecane is also possible. - Evaluation of organic contaminants on one side of the wafer is possible. - Detection of easily volatile components is possible since vacuum pumping is not required. - Organic components can be detected with high sensitivity (for 300mm wafers, on the order of 0.01ng/cm²). - Quantification using hexadecane conversion is possible.

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- Evaluation of organic contaminants adhering to the wafer surface in the cleanroom - Evaluation of organic contaminants adhering to the wafer surface in wafer transport containers (such as FOSB) - Evaluation of organic contaminants adhering to the wafer surface in the semiconductor manufacturing process

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Evaluation of Organic Contamination Using a Wafer Analyzer with GC-MS_B0230

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