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[Analysis Case] Local Crystal Structure Analysis of IGZO Film

c0330.jpg

[Analysis Case] Local Crystal Structure Analysis of IGZO Film

c0330.jpg
c0330.jpg

Continuous evaluation of crystallinity and orientation using electron diffraction.

IGZO films are materials that are being researched and developed as TFT materials for displays. The presence or absence of crystalline structure in the thin film may affect the TFT characteristics and reliability, necessitating local crystalline evaluation within the device. We will introduce a case where the crystalline structure in IGZO films was continuously evaluated using electron diffraction measurements from TEM.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/76…

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Analysis of oxide semiconductors.

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[Analysis Case] Local Crystal Structure Analysis of IGZO Film_C0330

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