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[Analysis Case] Evaluation of H Concentration in IGZO Film

c0328.jpg

[Analysis Case] Evaluation of H Concentration in IGZO Film

c0328.jpg
c0328.jpg

It is possible to evaluate the depth distribution of H in the IGZO film with high sensitivity.

IGZO films are materials that are being researched and developed as TFT materials for displays. The carrier concentration changes according to the hydrogen concentration in the IGZO film, leading to variations in electrical characteristics. Therefore, it is necessary to accurately measure the hydrogen concentration in the film for evaluating the device characteristics and reliability of devices using IGZO films. We will introduce a case study that evaluated the hydrogen concentration in IGZO films under different heating conditions using SIMS.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/77…

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Analysis of oxide semiconductors.

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[Analysis Case] Evaluation of H Concentration in IGZO Film_C0328

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