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[Analysis Case] Evaluation of the Chemical State of IGZO Film

Evaluation of bonding state and electronic state using XPS and UPS.

IGZO films are materials that are being researched and developed as TFT materials for displays. Since they are composed of multiple metal elements, it is important to understand how the composition, bonding state, and electronic state change depending on the process. We will introduce examples of evaluating the composition, bonding state, and electronic state of IGZO film surfaces using XPS and UPS.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/75…

basic information

For detailed data, please refer to the catalog.

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Applications/Examples of results

Analysis of oxide semiconductors.

[Analysis Case] Evaluation of the Chemical State of IGZO Film_C0331

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!