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Evaluation methods for organic compounds in clean rooms

B0245_クリーンルーム内有機化合物の評価方法.jpg

Evaluation methods for organic compounds in clean rooms

B0245_クリーンルーム内有機化合物の評価方法.jpg
B0245_クリーンルーム内有機化合物の評価方法.jpg

GC/MS: Gas Chromatography-Mass Spectrometry

In clean rooms where the manufacturing of semiconductors and liquid crystals takes place, it is important to monitor not only particles but also molecular-level chemical contamination (molecular contamination). Floating molecular contaminants include acidic and basic gases, cohesive organic substances, dopants, and metals, and the analysis methods vary depending on the components. Here, we will introduce details about cohesive organic substances and the representative collection methods, "adsorbent collection" and "wafer exposure collection."

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/46…

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For detailed data, please refer to the catalog.

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Analysis of LSI, memory, power devices, solar cells, displays, and oxide semiconductors.

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Evaluation Method for Organic Compounds in Clean Rooms_B0245

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