[Analysis Case] Evaluation of Composition and Bonding State of GaN Film by XPS
Evaluation will be conducted under measurement conditions tailored to the purpose.
This text introduces an example of evaluating the composition and bonding states of GaN films used in LEDs and power devices using XPS. Understanding how the composition and bonding states change due to film formation conditions and surface treatments is effective for process management. It is important to appropriately select the X-rays used during the evaluation according to the purpose. Measurement conditions for each focus will also be presented.
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Applications/Examples of results
Analysis of lighting, displays, oxide semiconductors, power devices, and optical devices.