Examples of TDS analysis by representative materials and purposes
TDS: Thermal Desorption Gas Analysis Method
TDS is a method that heats samples in high vacuum (1E-7 Pa) and detects the gases that are released. By heating the sample at a constant rate in high vacuum, it is possible to confirm the temperature dependence of even trace amounts of desorption (at the monolayer level). Additionally, for some components, it is also possible to calculate the number of molecules of the desorbed gas. We will introduce examples of TDS applied to representative materials.
basic information
For detailed data, please refer to the catalog.
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Applications/Examples of results
Display, oxide semiconductors, power devices, LSI, memory, electronic components, manufacturing equipment, and component analysis.
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Technical Information "De-gassing Evaluation of Plating Samples (C0464)" and 4 other items published.
We have published the following five analysis case studies on the MST website: - Degassing evaluation of plating samples (C0464) - TDS analysis examples by representative materials and purposes (B0232) - Peptide sequence analysis using LC/MS/MS (C0466) - Metal contamination evaluation of Si wafer surfaces (B0233) - Metal contamination evaluation in SiN films (C0465) For more details, please visit the MST website. http://www.mst.or.jp/
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Technical Information: Release of 'Distribution Evaluation of Powder Particle Surfaces by TOF-SIMS' and 3 other items.
We have published the following three analysis case studies on the MST website: - Distribution evaluation of powder particle surfaces using TOF-SIMS - Evaluation of thermal treatment temperature dependence of organic films using TDS - Degassing evaluation of resist films using TDS For more details, please visit the MST website. http://www.mst.or.jp/
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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!