Examples of TDS analysis by representative materials and purposes
TDS: Thermal Desorption Gas Analysis Method
TDS is a method that heats samples in high vacuum (1E-7 Pa) and detects the gases that are released. By heating the sample at a constant rate in high vacuum, it is possible to confirm the temperature dependence of even trace amounts of desorption (at the monolayer level). Additionally, for some components, it is also possible to calculate the number of molecules of the desorbed gas. We will introduce examples of TDS applied to representative materials.
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For detailed data, please refer to the catalog.
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Applications/Examples of results
Display, oxide semiconductors, power devices, LSI, memory, electronic components, manufacturing equipment, and component analysis.