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Examples of TDS analysis by representative materials and purposes

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Examples of TDS analysis by representative materials and purposes

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b0232.jpg C0497_試料構造.png C0497_光学顕微鏡写真.png

TDS: Thermal Desorption Gas Analysis Method

TDS is a method that heats samples in high vacuum (1E-7 Pa) and detects the gases that are released. By heating the sample at a constant rate in high vacuum, it is possible to confirm the temperature dependence of even trace amounts of desorption (at the monolayer level). Additionally, for some components, it is also possible to calculate the number of molecules of the desorbed gas. We will introduce examples of TDS applied to representative materials.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/34…

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Display, oxide semiconductors, power devices, LSI, memory, electronic components, manufacturing equipment, and component analysis.

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