[ED] Electron Diffraction Method

ED is a method for investigating crystal structures from diffraction patterns obtained by irradiating a sample with an electron beam.

ED is a method for investigating crystal structures from diffraction patterns obtained by irradiating a sample with an electron beam. - Crystallographic information about the material can be obtained. In the case of a transmission electron microscope, a single crystal shows regularly arranged diffraction spots, a polycrystal shows concentric circular rings, and an amorphous material shows broad circular electron diffraction patterns. - It is possible to examine the crystal structure of small regions observed with a transmission electron microscope. - By combining the crystal structure with elemental analysis results from the EDX method, it is also possible to identify materials that possess crystallinity.

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basic information

When the incident electrons meet the Bragg condition at an angle with respect to the crystal lattice planes, they undergo elastic scattering. The scattered electrons interfere with each other, but only those electrons that satisfy the Bragg condition have intensity as diffracted waves in specific directions, forming diffraction spots. By analyzing the positional relationship between the transmitted light and the multiple diffraction spots, information about the crystal structure of the sample can be obtained.

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Applications/Examples of results

Evaluation of crystallinity, identification of crystal structure, evaluation of crystal orientation, evaluation of crystal alignment for materials such as Si, compound semiconductors, oxide semiconductors, and metals.