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[TEM-EELS] Electron Energy Loss Spectroscopy

By measuring the energy lost due to interactions with atoms as electrons pass through thin film samples, the constituent elements and electronic structure of the material can be analyzed.

EELS analysis is a method that measures the energy lost by electrons as they pass through thin samples due to interactions with atoms. It can analyze the constituent elements and electronic structure of materials. Compared to the elemental analysis device (EDX) attached to a TEM, it has the following features: - Better sensitivity for light elements compared to EDX - Higher energy resolution compared to EDX - Higher spatial resolution compared to EDX, making it difficult to detect surrounding information - Chemical state analysis is possible for certain elements

Related Link - https://www.mst.or.jp/method/tabid/148/Default.asp…

basic information

EELS is a spectroscopic method that analyzes the composition and bonding states of elements in a sample by measuring the energy lost by an incident electron beam as it excites electrons within the sample. EELS can be broadly divided into three regions: 1. Electrons that have passed through the sample without interacting (zero-loss electrons) and those that have elastically scattered. 2. The low-energy side of the valence electron excitation region, below 30 eV, which includes plasmons and interband transitions. 3. The inner-shell electron excitation region, which varies depending on the transitions from inner shell levels and is used for compositional analysis.

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Applications/Examples of results

■Composition analysis and surface analysis of microdomains (0.2nm to 1μm) ・Qualitative analysis - evaluation of light elements and transition elements ・Evaluation of the chemical state of elements - crystalline/amorphous carbon - evaluation of phase transitions and bonding states of compounds ・Evaluation of sample thickness

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