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[AES] Auger Electron Spectroscopy

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[AES] Auger Electron Spectroscopy

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By measuring the kinetic energy distribution of Auger electrons emitted by electron beam irradiation, insights can be gained regarding the types and quantities of elements present on the sample surface.

- Qualitative and quantitative analysis of solid material surfaces (depth of several nm) is possible. - Qualitative and quantitative analysis of micro-regions (approximately tens of nm to sub-micron) is possible. - Depth profile analysis, line analysis, and area analysis of major component elements can be measured. - For several elements such as Si and Al, evaluation in both oxide and metallic states is possible. - Identification of specific areas of interest using SEM images is possible.

Related Link - https://www.mst.or.jp/method/tabid/140/Default.asp…

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Applications/Examples of results

- Evaluation of interdiffusion in metallic multilayer films - Evaluation of oxide films of various metals - Composition evaluation of special shapes (spheres, inner walls, etc.) - Evaluation of elemental distribution and degradation in battery materials - Evaluation of foreign substances on devices in the range of tens of nm to submicron - Evaluation of interlayer anomalies using cross-sectional processing - Evaluation of layer structure and elemental distribution at fracture surfaces

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