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[AES] Auger Electron Spectroscopy

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[AES] Auger Electron Spectroscopy

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By measuring the kinetic energy distribution of Auger electrons emitted by electron beam irradiation, insights can be gained regarding the types and quantities of elements present on the sample surface.

- Qualitative and quantitative analysis of solid material surfaces (depth of several nm) is possible. - Qualitative and quantitative analysis of micro-regions (approximately tens of nm to sub-micron) is possible. - Depth profile analysis, line analysis, and area analysis of major component elements can be measured. - For several elements such as Si and Al, evaluation in both oxide and metallic states is possible. - Identification of specific areas of interest using SEM images is possible.

Related Link - https://www.mst.or.jp/method/tabid/140/Default.asp…

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Applications/Examples of results

- Evaluation of interdiffusion in metallic multilayer films - Evaluation of oxide films of various metals - Composition evaluation of special shapes (spheres, inner walls, etc.) - Evaluation of elemental distribution and degradation in battery materials - Evaluation of foreign substances on devices in the range of tens of nm to submicron - Evaluation of interlayer anomalies using cross-sectional processing - Evaluation of layer structure and elemental distribution at fracture surfaces

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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