一般財団法人材料科学技術振興財団 MST Official site

Structural analysis using Xe-plasma FIB.

Precision processing/structural evaluation is possible over a wide area of several hundred micrometers.

It achieves high positional accuracy and wide-area cross-section production, making it usable as a new large-capacity analysis application. Even small structures within a large area can be targeted for processing, enabling wide-area structural analysis.

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Applications/Examples of results

Analysis of LSI and memory. - Cryo processing of polymers and liquid materials - 3D large-capacity data analysis for batteries and bonding - Processing/observation/analysis in non-atmospheric exposure environments - High-sensitivity EDX elemental analysis - Precision processing of samples that are altered by Ga, such as compounds

Structural Analysis by Xe-Plasma FIB_B0255

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