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Structural analysis using Xe-plasma FIB.

B0255.jpg

Structural analysis using Xe-plasma FIB.

B0255.jpg
B0255.jpg

Precision processing/structural evaluation is possible over a wide area of several hundred micrometers.

It achieves high positional accuracy and wide-area cross-section production, making it usable as a new large-capacity analysis application. Even small structures within a large area can be targeted for processing, enabling wide-area structural analysis.

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Applications/Examples of results

Analysis of LSI and memory. - Cryo processing of polymers and liquid materials - 3D large-capacity data analysis for batteries and bonding - Processing/observation/analysis in non-atmospheric exposure environments - High-sensitivity EDX elemental analysis - Precision processing of samples that are altered by Ga, such as compounds

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Structural Analysis by Xe-Plasma FIB_B0255

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一般財団法人材料科学技術振興財団　MST
一般財団法人材料科学技術振興財団　MST
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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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