[TEM-EDX] Energy Dispersive X-ray Spectroscopy (TEM)

EDX is a method that measures the energy and occurrence of characteristic X-rays generated when an electron beam is irradiated onto the analysis area, allowing for elemental analysis and compositional analysis.

EDX is a method that measures the energy and occurrence of characteristic X-rays generated when an electron beam is irradiated onto the analysis target area, allowing for elemental and compositional analysis. It is also referred to as Energy Dispersive X-ray Spectroscopy (EDS). In many cases, it is attached to a SEM or TEM, and this document introduces the EDX that accompanies the TEM. - Simultaneous analysis of the entire range of elements (from B to U) is possible (detection of Be is also possible depending on the attached device). - Measurements can be made with a fine electron beam probe of 0.1 nm in diameter or smaller. - By using drift correction functionality, sub-nanometer layered films can be identified as distribution images in surface analysis. - In surface analysis, it is possible to extract spectra from arbitrary locations and display line analysis.

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basic information

EDX is a method for measuring the energy and occurrence of characteristic X-rays generated when an electron beam is irradiated onto the area of analysis. The energy of specific X-rays is unique to each element, allowing for the identification of the elements that make up the sample. Additionally, information about the composition can be obtained from the intensity.

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Applications/Examples of results

■Composition analysis and surface analysis of micro areas (up to 1μm) ・Analysis of deposition materials after RIE/wet etching ・Analysis of foreign substances at wafer defect locations identified by KLA defect inspection equipment ・Shape and composition analysis of Ni silicide

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Please consult with us first. ★ We will start with a proposal for an analysis plan ★ Meetings at your company are, of course, possible. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!
We will hold a visiting seminar. ★ We offer free seminars with engineers tailored to our customers' needs ★ Depending on your requests, we will introduce analysis techniques and explain analysis data. ◆ Example seminar content - A broad explanation of MST analysis methods - A detailed explanation of specific analysis methods from the principles - An explanation of the analysis data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!

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一般財団法人材料科学技術振興財団　MST

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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