[TEM-EDX] Energy Dispersive X-ray Spectroscopy (TEM)

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EDX is a method that measures the energy and occurrence of characteristic X-rays generated when an electron beam is irradiated onto the analysis area, allowing for elemental analysis and compositional analysis.

EDX is a method that measures the energy and occurrence of characteristic X-rays generated when an electron beam is irradiated onto the analysis target area, allowing for elemental and compositional analysis. It is also referred to as Energy Dispersive X-ray Spectroscopy (EDS). In many cases, it is attached to a SEM or TEM, and this document introduces the EDX that accompanies the TEM. - Simultaneous analysis of the entire range of elements (from B to U) is possible (detection of Be is also possible depending on the attached device). - Measurements can be made with a fine electron beam probe of 0.1 nm in diameter or smaller. - By using drift correction functionality, sub-nanometer layered films can be identified as distribution images in surface analysis. - In surface analysis, it is possible to extract spectra from arbitrary locations and display line analysis.

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EDX is a method for measuring the energy and occurrence of characteristic X-rays generated when an electron beam is irradiated onto the area of analysis. The energy of specific X-rays is unique to each element, allowing for the identification of the elements that make up the sample. Additionally, information about the composition can be obtained from the intensity.

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Applications/Examples of results

■Composition analysis and surface analysis of micro areas (up to 1μm) ・Analysis of deposition materials after RIE/wet etching ・Analysis of foreign substances at wafer defect locations identified by KLA defect inspection equipment ・Shape and composition analysis of Ni silicide