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[EPMA] Electron Probe Micro Analyzer

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[EPMA] Electron Probe Micro Analyzer

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By analyzing the characteristic X-rays generated when a finely focused electron beam is irradiated onto the surface of a solid sample in a vacuum, insights can be gained regarding the identification of elements and quantitative values.

By analyzing characteristic X-rays using a wavelength dispersive X-ray spectrometer (WDX), measurements with higher sensitivity than those obtained with an energy dispersive X-ray spectrometer (EDX) can be achieved. Additionally, using soft X-ray emission spectroscopy (SXES) allows for the acquisition of information regarding local chemical bonding states.

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Applications/Examples of results

WDX - Composition analysis of foreign substances - Visualization of elemental distribution through surface analysis - Quantitative analysis of trace impurities below 1% SXES - Analysis of chemical bonding states of transition metals (valence evaluation) - Local state analysis from the sample cross-section direction - Changes in bonding states of carbon materials (sp2, sp3)

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