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[EPMA] Electron Probe Micro Analyzer

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[EPMA] Electron Probe Micro Analyzer

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By analyzing the characteristic X-rays generated when a finely focused electron beam is irradiated onto the surface of a solid sample in a vacuum, insights can be gained regarding the identification of elements and quantitative values.

By analyzing characteristic X-rays using a wavelength dispersive X-ray spectrometer (WDX), measurements with higher sensitivity than those obtained with an energy dispersive X-ray spectrometer (EDX) can be achieved. Additionally, using soft X-ray emission spectroscopy (SXES) allows for the acquisition of information regarding local chemical bonding states.

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Applications/Examples of results

WDX - Composition analysis of foreign substances - Visualization of elemental distribution through surface analysis - Quantitative analysis of trace impurities below 1% SXES - Analysis of chemical bonding states of transition metals (valence evaluation) - Local state analysis from the sample cross-section direction - Changes in bonding states of carbon materials (sp2, sp3)

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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